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MEMS device in-situ real-time test dock and failure fault tracing method

A real-time testing and device technology, applied in the field of MEMS devices, can solve the problem of not being able to know the type of environmental stress in real time in situ, and achieve the effect of ingenious design and reasonable structure

Pending Publication Date: 2020-12-25
山西羽炎星微纳物联科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problem that the type of environmental stress that causes the failure cannot be known in situ and in real time when a failure occurs in the MEMS device, the present invention provides an in-situ real-time test dock for the MEMS device and a method for tracing the source of the failure

Method used

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  • MEMS device in-situ real-time test dock and failure fault tracing method
  • MEMS device in-situ real-time test dock and failure fault tracing method
  • MEMS device in-situ real-time test dock and failure fault tracing method

Examples

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Embodiment 1

[0043]An in-situ real-time test dock for MEMS devices, including a test seat board 1, a battery 2, a power management chip 3, a MEMS device 4, a sensor array, an analog-to-digital converter 6, a microprocessor 7, a memory 8, a wireless transmitter 9, Wireless receiver 10, host computer 11;

[0044] The sensor array includes a temperature and humidity sensor 501, an air pressure sensor 502, a magnetic field sensor 503, an altitude sensor 504, a vibration sensor 505, a frequency sensor 506, a voltage collector 507, a current collector 508, and a power collector 509;

[0045] Battery 2, power management chip 3, MEMS device 4, temperature and humidity sensor 501, air pressure sensor 502, magnetic field sensor 503, height sensor 504, vibration sensor 505, frequency sensor 506, voltage collector 507, current collector 508, power collector 509, the analog-to-digital converter 6, the microprocessor 7, the memory 8, and the wireless transmitter 9 are all fixed on the upper surface of t...

Embodiment 2

[0078] An in-situ real-time test dock for MEMS devices, including a test seat board 1, a battery 2, a power management chip 3, a MEMS device 4, a sensor array, an analog-to-digital converter 6, a microprocessor 7, a memory 8, a wireless transmitter 9, Wireless receiver 10, host computer 11;

[0079] The sensor array includes a temperature and humidity sensor 501, an air pressure sensor 502, a magnetic field sensor 503, an altitude sensor 504, a vibration sensor 505, a frequency sensor 506, a voltage collector 507, a current collector 508, and a power collector 509;

[0080] Battery 2, power management chip 3, MEMS device 4, temperature and humidity sensor 501, air pressure sensor 502, magnetic field sensor 503, height sensor 504, vibration sensor 505, frequency sensor 506, voltage collector 507, current collector 508, power collector 509, the analog-to-digital converter 6, the microprocessor 7, the memory 8, and the wireless transmitter 9 are all fixed on the upper surface of ...

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Abstract

The invention relates to an MEMS device, in particular to an MEMS device in-situ real-time test dock and a failure fault tracing method. According to the MEMS device in-situ real-time test dock, the problem that the environmental stress type causing the failure fault cannot be obtained in situ in real time when the MEMS device has the failure fault is solved. The MEMS device in-situ real-time testdock comprises a test seat plate, a battery, a power supply management chip, an MEMS device, a sensor array, an analog-to-digital converter, a microprocessor, a memory, a wireless transmitter, a wireless receiver and an upper computer, the sensor array comprises a temperature and humidity sensor, an air pressure sensor, a magnetic field sensor, a height sensor, a vibration sensor, a frequency sensor, a voltage collector, a current collector and a power collector. The method is suitable for the fields of aviation, spaceflight, national defense and the like.

Description

technical field [0001] The invention relates to MEMS devices, in particular to an in-situ real-time test dock for MEMS devices and a failure tracing method. Background technique [0002] MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) devices are widely used in fields such as aviation, aerospace, and national defense because of their advantages of small size, light weight, and low power consumption. In practical applications, the working environment of MEMS devices is often complex and changeable, which makes MEMS devices prone to failure under the action of environmental stress. However, under the current technical conditions, when a MEMS device fails, people cannot know the type of environmental stress that caused the failure in situ and in real time (that is, which environmental stress caused the failure), so it is impossible to perform in situ and real-time Failure traceability is not conducive to the optimization and improvement of MEMS devices....

Claims

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Application Information

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IPC IPC(8): G01R31/00G01D21/02
CPCG01R31/00G01D21/02
Inventor 张钟方
Owner 山西羽炎星微纳物联科技有限公司
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