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Temperature, pressure and acoustics integrated MEMS underwater sensor and system

An underwater sensor and pressure technology, applied in the direction of instruments, measuring instrument components, measuring devices, etc., can solve the problems that polymer materials cannot be sensed and measured with high precision pressure, and the integration of temperature, pressure, and acoustic sensitive units cannot be realized

Active Publication Date: 2020-12-29
THE THIRD RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the acoustic polyurethane packaging structure of the existing hydrophone is used for underwater temperature-pressure sensor packaging, it faces the problem that it cannot be used for high-precision pressure sensing and measurement due to the deformable polymer material.
[0004] In summary, in view of the existing underwater temperature-pressure sensor and hydrophone structure, the integration of temperature, pressure, and acoustic sensitive units cannot be realized

Method used

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  • Temperature, pressure and acoustics integrated MEMS underwater sensor and system
  • Temperature, pressure and acoustics integrated MEMS underwater sensor and system
  • Temperature, pressure and acoustics integrated MEMS underwater sensor and system

Examples

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Effect test

Embodiment 1

[0041] Temperature, pressure, acoustics integrated MEMS underwater sensor

[0042] Such as Figures 1 to 3 As shown, the MEMS underwater sensor 10 includes acoustic vector sensing units 13 , 14 , an acoustic pressure sensing unit 15 and a temperature-pressure sensing unit 16 . Acoustic vector sensitive units 13, 14, the top surface 111 of the first carrier plate 11 of the sound pressure sensitive unit 15, and the temperature-pressure sensitive unit 16 is arranged on the bottom surface 112 of the first carrier plate 11; board bonding. Among them, the acoustic vector sensitive units 13, 14 and the sound pressure sensitive unit 15 located on the top surface of the first carrier are encapsulated by a sound-permeable cap, and the temperature-pressure sensitive unit 16 located on the bottom surface of the first carrier is encapsulated by a metal shell.

[0043]Acoustic vector sensitive units 13 and 14 are horizontally and orthogonally placed on the same plane, and can perceive the...

Embodiment 2

[0046] Temperature, pressure, acoustics integrated MEMS underwater sensor

[0047] The main difference between the second embodiment and the first embodiment is that the pressure sensitive unit and the temperature sensitive unit of the MEMS underwater sensor are arranged separately; the signal conditioning unit is laminated and arranged below the temperature sensitive unit.

[0048] Such as Figure 4 As shown in -6, the MEMS underwater sensor 20 includes acoustic vector sensitive units 23 and 24, an acoustic pressure sensitive unit 25, a pressure sensitive unit 26, and a temperature sensitive unit 27. Acoustic vector sensing units 23 and 24 are horizontally and orthogonally placed on the same plane, and can perceive the particle velocity information in two dimensions in the underwater sound field, and the sound pressure sensing unit 25 can sense the sound pressure information in the underwater sound field. Considering the sound transmission requirements of the acoustic sensit...

Embodiment 3

[0051] Temperature, pressure, acoustics integrated MEMS underwater sensor

[0052] The main difference between the third embodiment and the second embodiment is that the signal conditioning unit is arranged in parallel with the pressure sensitive unit and the temperature sensitive unit.

[0053] Such as Figure 7 Shown in -9, MEMS underwater sensor 30 is made up of acoustic vector sensitive unit 33 and 34, sound pressure sensitive unit 35, pressure sensitive unit 36, temperature sensitive unit 37 and signal conditioning unit 38, and acoustic vector sensitive unit 33 and 34 are the same The plane is placed horizontally and orthogonally, and can sense particle velocity information in two dimensional directions in the underwater sound field, and the sound pressure sensitive unit 35 can sense sound pressure information in the underwater sound field. Considering the sound transmission requirements of the acoustic sensitive units 33, 34 and 35 and the high-precision measurement req...

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Abstract

The invention relates to a temperature, pressure and acoustics integrated MEMS underwater sensor and system. The sensor comprises an acoustic vector sensitive unit, an acoustic pressure sensitive unit, a pressure sensitive unit, and a temperature sensitive unit, wherein the acoustic vector sensitive unit and the acoustic pressure sensitive unit are disposed on the top surface of a first carrier plate, the pressure sensitive unit and the temperature sensitive unit are disposed on the bottom surface of the first carrier plate, the acoustic vector sensing unit and the acoustic pressure sensing unit which are located on the top surface of the first carrier plate are packaged through an acoustic transmission cap, and the pressure sensing unit and the temperature sensing unit which are located on the bottom surface of the first carrier plate are packaged through a metal shell. According to the sensor, integration of temperature, pressure and acoustic sensitive units can be realized, and underwater temperature, pressure and acoustic detection is realized.

Description

technical field [0001] The invention relates to a temperature, pressure and acoustics integrated MEMS underwater sensor and system. Background technique [0002] In the prior art, the oil seal structure of the underwater temperature-pressure sensor is a metal shell body structure, and silicone oil is used as the filling medium to form an oil-filled core structure of the temperature-pressure sensor to realize high-precision perception and measurement of underwater pressure information, as well as temperature - Packaging of pressure integrated sensors. The existing underwater temperature-pressure sensor has the problem of impenetrable sound due to the metal shell body structure, so it cannot be used for acoustic sensor packaging. [0003] In the prior art, underwater acoustic sensors (hydrophones) are usually protected by polyurethane potting or used as a shell material, and liquid media such as silicone oil and castor oil are filled in the shell to effectively reduce the pen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02G01D11/24
CPCG01D21/02G01D11/245
Inventor 朱晓枭周瑜魏晓村谢奕李成豪陈晓奇冯杰刘云飞
Owner THE THIRD RES INST OF CHINA ELECTRONICS TECH GRP CORP
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