A Method for Eliminating Interference Magnetic Field Noise of Eddy Current Displacement Sensor
A displacement sensor and interference magnetic field technology, applied in the direction of using electromagnetic means, instruments, and electrical devices, etc., can solve the problem of residual noise components of the output signal, and achieve the effect of simple circuit, good versatility, and avoidance of thermal noise.
Active Publication Date: 2022-01-28
HEFEI UNIV OF TECH
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However, the existing methods cannot completely eliminate the influence of the interfering magnetic field, and the output signal will still have noise components related to the interfering magnetic field, which need to be eliminated by other methods
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[0028] A method for eliminating interference magnetic field noise of an eddy-current displacement sensor, the method comprising the steps in the following order:
[0029] (1) choose a common sensor probe 1, the front end of the sensor probe 1 is provided with the detection coil 2 for measuring the distance x between the detection coil 2 and the target conductor 3, and the detection coil 2 is affected by the disturbance magnetic field B in the surrounding environment;
[0030] (2) Select a general displacement measurement module, design and manufacture an interference magnetic field detection module and a magnetic field noise elimination module, and the detection coil 2 is respectively connected to the displacement measurement module and the interference magnetic field detection module through the coaxial cable 4 and the cable interface, and the displacement The output signals of the measurement module and the interference magnetic field detection module are connected to the mag...
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The invention relates to a method for eliminating interference magnetic field noise of an eddy current displacement sensor, comprising: selecting a general sensor probe and setting a detection coil at its front end; selecting a general displacement measurement module, designing and manufacturing an interference magnetic field detection module and a magnetic field noise Eliminate the module, the detection coil is respectively connected to the displacement measurement module and the interference magnetic field detection module through the coaxial cable and the cable interface, and the output signals of both are connected to the magnetic field noise elimination module; the output signal of the interference magnetic field detection module is the interference magnetic field signal U m ; The output signal of the displacement measurement module contains the displacement signal U to be measured x and disturbing magnetic field noise N m ; The output signal of the magnetic field noise elimination module is to eliminate the interference magnetic field noise N m The measured displacement signal U x . The invention is applicable to various existing eddy current displacement sensors without changing detection coils and detection circuits, and has simple circuit, low cost and good versatility.
Description
technical field [0001] The invention relates to the technical field of eddy current displacement sensors, in particular to a method for eliminating interference magnetic field noise of an eddy current displacement sensor. Background technique [0002] With the continuous development of ultra-precision manufacturing technology, the precision measurement technology that high-end manufacturing relies on is still lacking. There is an increasingly urgent demand for ultra-precision displacement sensors in terms of processing, assembly, and testing. From the micro-nanometer level to the sub-nanometer level. Non-contact displacement sensors are the mainstream of current industrial displacement measurement, mainly including capacitive, eddy current and photoelectric. Among them, eddy current displacement sensors have the advantages of high sensitivity, good reliability, and no influence of oil pollution. They are used in ultra-precision machine tools has a very wide range of applica...
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IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 潘成亮任淑鹏卢建池吴天强吴家豪石超丰安辉胡民港
Owner HEFEI UNIV OF TECH