Tool and method for detecting high-pressure helium mass spectrum leakage rate of diaphragm valve
A technology of helium mass spectrometer and diaphragm valve, which is applied in the field of diaphragm valve detection tooling, can solve the problems of long detection time, poor sealing performance, and low reliability, and achieve the effects of short detection time, high sealing performance and high reliability
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[0032] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0033] Such as Figure 1 to Figure 4 As shown, a tooling for leak rate detection of high-pressure helium mass spectrometry of a diaphragm valve, including a first nozzle 1, a second nozzle 2, and an annular leak detection component 3;
[0034] The annular leak detection assembly 3 includes an annular sleeve 7, a straight pipe section 8 and a straight joint 9; the straight joint 9 communicates with the annular sleeve 7 through the branch pipe section 8;
[0035] The first nozzle 1 and the second nozzle 2 are all provided with a radial connecting plate 11, and the inner side of the radial connecting plate 11 is respectively provided with an annular boss 12, and the inner diameter of the annular boss 12 is larger than that of the diaphragm valve to be tested. Two annular bosses 12 are arranged correspondingly; two radial connecting plates 11 are ...
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