Semiconductor laser coherent array and preparation method thereof

Abstract

The invention provides a semiconductor laser coherent array, and the array is characterized in that the semiconductor laser coherent array comprises a multi-mode interference region which comprises amulti-stage one-to-two multi-mode interference coupling structure and a plurality of bent waveguides, wherein the multi-mode interference coupling structure between different stages is connected through the bent waveguides, and the multi-stage one-to-two multimode interference coupling structure is used for generating a plurality of phase coherent optical branches; a reflection region which is used for transmitting the plurality of optical branches and controlling the energy ratio output by the optical branches by adjusting the reflectivity; and an array region which comprises a plurality of channel waveguides and is used for carrying out power amplification on the plurality of optical branches output by the reflection region and then outputting the amplified optical branches. The invention further provides a preparation method of the semiconductor laser coherent array.

Description

technical field [0001] The present disclosure relates to the field of semiconductor optoelectronic technology, in particular to a coherent array of semiconductor lasers and a preparation method thereof. Background technique [0002] Semiconductor lasers have the advantages of small size, high efficiency, and easy operation. However, due to the limited power of a single laser, it still cannot meet the needs in some application scenarios. The emergence of coherent array lasers enables semiconductor lasers to retain their advantages while having greater output power, which enriches the applications of photoelectric countermeasures, medical treatment, and information processing. Coherent array lasers use optical waveguide theory and technology to integrate multiple lasers into a single chip, so that effective coupling between each laser can be achieved to achieve coherent high-power output. The coherent array enables high output power while ensuring good output characteristics ...

AI Technical Summary

Problems solved by technology

[0003]Currently, the coherent technologies of array lasers mainly include evanescent wave coupling, Y-shaped waveguide array and Talbot coupling cavity structure, etc. The waveguide array and the Talbot coupling cavity structure are respectively limited by maintaining a specific finite distance, poor heat dissipation of the device, and difficulty in maintaining a continuous operating wave mode, etc., which have low output power amplifier effect, low optical efficiency, and low heat dissipation performance of the device. and other defects

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