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Microstructure generation method and product with microstructure on surface

A microstructure and product technology, applied in the field of microstructure generation and products with microstructures on the surface, can solve the problems of low product accuracy, poor repeatability and controllability, achieve high precision and reliability, and ensure anti-glare effect. Effect

Inactive Publication Date: 2021-01-22
ZHEJIANG CRYSTAL OPTECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the products produced in this way have low precision, poor repeatability and controllability

Method used

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  • Microstructure generation method and product with microstructure on surface
  • Microstructure generation method and product with microstructure on surface
  • Microstructure generation method and product with microstructure on surface

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0035] The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application.

[0036] see figure 1 , figure 1 It is a flow chart of a method for generating a microstructure provided by an embodiment of the present application. In this embodiment, the method for generating a microstructure may include step S10 and step S20.

[0037] In order to ensure the anti-glare effect of the product with microstructure (anti-glare product), before step S10, a brief introduction is made to the first template with microstructure.

[0038] In this embodiment, the first template has a microstructure, and the microstructure here means: it includes a plurality of monomer structures having at least one structural feature. The structural features here indicate that the multiple monomer structures have different sizes, or that the multiple monomer structures are arranged non-uniformly.

[0039]...

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Abstract

The invention provides a microstructure generation method and a product with a microstructure on the surface, and the method comprises the steps: forming a mask layer with the microstructure on a substrate according to a first template with the microstructure on the surface, the microstructure comprises a plurality of single structures with at least one structural feature, and the structural features are that the sizes of the plurality of single structures are different, or the plurality of single structures are non-uniformly arranged; and carrying out plasma etching on the substrate with themask layer so as to re-etch the microstructure contained in the mask layer onto the body of the substrate. The anti-glare effect of the product can be guaranteed through the microstructure, the microstructure of the first template is re-etched to the mask layer of the substrate, then the microstructure of the mask layer is re-etched to the body of the substrate in a plasma etching mode, and the performance, the precision and the reliability of the product can be improved.

Description

technical field [0001] The present application relates to the technical field of plasma etching, in particular, to a method for generating a microstructure and a product with a microstructure on its surface. Background technique [0002] When light hits a smooth material surface (such as glass, quartz, sapphire, etc.), specular reflection will occur, and the reflected light is very bright (that is, glare). When it enters the human eye, it will make people unable to see the surface of the material and the image displayed through the material. , and even cause visual fatigue. In the consumer electronics market, various electronic products are equipped with screens for display, but the materials and smooth surfaces of the screens are prone to glare. [0003] At present, anti-glare technology accounts for a large proportion of various display applications (such as vehicle screens, mobile phone screens, etc.), but with the rise of the micro-nano industry, existing technologies h...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C15/00C04B41/53G03F7/00
CPCC03C15/00C04B41/5346C04B41/009G03F7/0002
Inventor 李磊刘风雷李其凡王琳高雅楠蒋晓
Owner ZHEJIANG CRYSTAL OPTECH
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