A kind of test method of emccd charge transfer efficiency

Abstract

The invention discloses a test method for EMCCD charge transfer efficiency, comprising the following steps: a, adopting a non-multiplication mode, measuring the value V2 of the non-multiplication output signal charge of the EMCCD before transfer, and recording all AC and DC electrode data at this time, Temperature data and illumination data; b. Using the multiplication mode, the AC and DC electrode data, temperature data and illumination data are executed according to step a, and the dynode is adjusted separately, and the value V1 of the multiplication output signal charge of the EMCCD before transfer is measured; c. V1 Substituting V2 into the formula to calculate the charge transfer efficiency of EMCCD; this method is based on the existing layout structure of EMCCD, without changing the circuit layout and process, and can accurately test and calculate the charge transfer efficiency of EMCCD.

Description

technical field [0001] The invention relates to the technical field of optoelectronic device testing, in particular to a method for testing the charge transfer efficiency of an EMCCD. Background technique [0002] EMCCD is an electron multiplying charge coupled device, which is a high-end photoelectric detection product with extremely high sensitivity in the detection field. The charge in each inter-pixel charge packet is transferred between pixels as the phase clock voltage changes, and the charge transfer efficiency represents the degree of charge loss that is successfully transferred to the next pixel. In EMCCD, the signal charge of some pixels needs to be transferred thousands of times to reach the output port of the device, and the reduction of charge transfer efficiency will cause the signal charge of such pixels to be seriously attenuated, reduce the dynamic range, and increase the difference between pixels. The image may be smeared, etc. [0003] On the national st...

AI Technical Summary

Problems solved by technology

The advantage of this method is that the signal charge can be accurately calculated before the signal charge is transferred, and the signal charge after being transferred n times can be measured after the transfer, and can be substituted into the formula to obtain the charge transfer efficiency parameter more accurately; the disadvantage is that There are major changes to the EMCCD layout and process. On the circuit layout, a test verification circuit needs to be specially designed for testing the transfer efficiency. At the same time, in order to prevent unnecessary light injection, a row or column in the photosensitive area must be covered with aluminum. This row or column is It cannot be sensitive to light, and cannot be used as a functional circuit. The cost of revision is expensive, and many non-functional areas are added, which increases the area needlessly, and pays too much for the test transfer efficiency.

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