Laser direct writing energy correction method and device

Abstract

The embodiment of the invention provides a laser direct writing energy correction method and device. The method comprises the steps: enabling a micro-mirror array to be divided into a plurality of sub-regions, and enabling each sub-region to comprise a plurality of micro-mirrors which are arranged in an array mode; acquiring an image formed by a laser beam reflected by the sub-region on a detector; acquiring brightness values of micro-mirrors in at least a part of the region in the micro-mirror array according to the image; obtaining a brightness integral value of each column of micro-mirrorsin a scanning direction according to the brightness values of the micro-mirrors in the at least partial region; and performing energy correction on the micro-mirror array according to the brightness integral value of each column of the micro-mirrors. The embodiment of the invention provides the laser direct writing energy correction method and device which solve a problem that the detector cannotacquire all micro-mirror reflection beams of the micro-mirror array, realize complete imaging of the detector on the micro-mirror array, and improve the accuracy of laser direct writing energy correction so that the problem of brightness uniformity is solved.

Description

technical field [0001] The invention relates to laser direct writing technology, in particular to a laser direct writing energy correction method and device. Background technique [0002] Laser direct writing imaging equipment, also known as direct image transfer equipment, is an important equipment in the field of semiconductor and printed circuit board (PCB) production that is different from traditional semi-automatic exposure equipment. The pattern generator is used to replace the mask plate of traditional imaging equipment, so that the graphic data of the computer can be directly exposed to the wafer or PCB board, which saves the time of board making and the cost of making the mask plate, and can be used as the mask plate itself. And the equipment of most manufacturers in the past uses the spatial light modulator (SLM) as the pattern generator. SLM includes digital micromirror device (DMD) and liquid crystal display (LCD). SLM includes an independently addressable and co...

AI Technical Summary

Problems solved by technology

[0006] The embodiment of the present invention provides a laser direct writing energy correction method and device, which avoids the problem that the detector cannot obtain all the reflected beams of the micromirrors of the micromirror array, realizes the complete imaging of the micromirror array by the detector, and improves the laser direct writing performance. Accuracy of energy correction to resolve brightness uniformity issues

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