Transmission shaft connecting structure and application thereof
A technology of connecting structure and transmission shaft, applied in the direction of coupling, elastic coupling, mechanical equipment, etc., can solve the problems of inability to cope, fragile and fragile, increase the offset of silicon wafer tape out, etc., to reduce stress The effect of peaking, avoiding chipping damage, reducing offset
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[0025] The specific implementation manners of the present invention will be further described below in conjunction with the drawings and examples. The following examples are only used to illustrate the technical solution of the present invention more clearly, but not to limit the protection scope of the present invention.
[0026] The technical scheme of concrete implementation of the present invention is:
[0027] Such as figure 1 and figure 2 As shown, a transmission shaft connection structure includes a transmission shaft 1, the transmission shaft 1 is a ceramic shaft or a quartz glass shaft; one end of the transmission shaft 1 is provided with a mounting hole 2, and the mounting hole 2 is coaxial with the transmission shaft 1;
[0028] A screw 3 is inserted into the installation hole 2, the end of the screw 3 away from the transmission shaft 1 is provided with a coupling 4, the end of the screw 3 inserted into the installation hole 2 is provided with an extrusion head 5...
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