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Miniature oxygen sensor chip

An oxygen sensor and chip technology, which is applied in the field of concentration battery type miniature oxygen sensor chip, can solve the problems of long response time and slow ignition, and achieve the effect of reduced response time and small internal resistance

Pending Publication Date: 2021-03-02
东莞聚德寿科技有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Therefore, the current miniature oxygen sensor chip has problems such as long response time and slow ignition.

Method used

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  • Miniature oxygen sensor chip

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Embodiment Construction

[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] The embodiment of the present invention discloses a miniature oxygen sensor chip, such as figure 1 As shown, it includes a protective layer 1, a sensitive electrode outer electrode layer 2, a first zirconia matrix layer 3, a sensitive electrode inner electrode layer 4, an air channel layer 5, a second zirconia matrix layer 6, a first insulating layer 7, Heating electrode layer 8, second insulating layer 9, third zirconia base l...

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Abstract

The invention discloses a miniature oxygen sensor chip, which sequentially comprises a protective layer, a sensitive electrode outer electrode layer, a first zirconium oxide substrate layer, a sensitive electrode inner electrode layer, an air channel layer, a second zirconium oxide substrate layer, a first insulating layer, a heating electrode layer, a second insulating layer, a third zirconium oxide substrate layer, a third insulating layer and a heating electrode pin layer; the thickness of the first zirconium oxide substrate layer and the thickness of the third zirconium oxide substrate layer are symmetrical and range from 80 micrometers to 120 micrometers, the thickness ratio of the first zirconium oxide substrate layer to the second zirconium oxide substrate layer to the third zirconium oxide substrate layer ranges from 1:8:1-1:11:1, and the thickness of the second zirconium oxide substrate layer ranges from 800 micrometers to 900 micrometers. By controlling the thickness, it is guaranteed that the internal resistance of the sensitive electrode is as small as possible, and the response time of the oxygen sensor is shortened on the premise that other functions are guaranteed.

Description

technical field [0001] The invention relates to the technical field of sensor chips, in particular to a concentration cell type miniature oxygen sensor chip. Background technique [0002] At present, the chip concentration cell type oxygen sensor has a three-layer structure: a heater layer, an air channel layer and a sensitive electrode layer. And the electrode material of the zirconia oxygen sensor is platinum, which plays the role of catalysis and electrode. In order to ensure the effect of thick film printing, the current manufacturing process mainly adopts the method of stacking and co-firing after printing the front and back sides of three-layer equal-thickness zirconia cast sheets. The greater the thickness of the sensitive electrode layer, the greater the internal resistance, and the response time of the oxygen sensor. the longer. Therefore, the current miniature oxygen sensor chips have problems such as long response time and slow ignition. [0003] Therefore, how...

Claims

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Application Information

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IPC IPC(8): G01N27/409
CPCG01N27/409
Inventor 于金营
Owner 东莞聚德寿科技有限公司
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