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A Deviation Correction Method of Beam Pointing Control System Based on Axicon

A beam pointing and control system technology, applied in optics, optical components, instruments, etc., can solve problems such as the impact of detection accuracy, deviation of detector installation position, complex structure of beam pointing control system, etc., to achieve stable detection results, cost saving, Effect of lowering resolution requirements

Active Publication Date: 2022-02-11
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The purpose of the present invention is to solve the technical problem that the existing beam pointing control system has a complex structure, the deviation of the detector installation position and the interference of dust in the air have a great influence on the detection accuracy, and provides a kind of deviation of the beam pointing control system based on the axicon Correction method

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  • A Deviation Correction Method of Beam Pointing Control System Based on Axicon
  • A Deviation Correction Method of Beam Pointing Control System Based on Axicon
  • A Deviation Correction Method of Beam Pointing Control System Based on Axicon

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Embodiment Construction

[0035] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0036] A beam pointing control system based on axicon mirrors. First, two fast deflecting mirrors are set in the laser light path to fine-tune the angle and position offset of the laser beam. After the fast deflecting mirrors, a beam splitter 3 is used to split a beam of light It is used as a sample laser beam to judge the offset of the laser beam. The sampled laser beam split by the beam splitter 3 is shaped into a Bessel beam after passing through the cone mirror 4, and a high-resolution detector 5 is set within the focal depth range of the Bessel beam to detect the position and position of the beam. energy distribution.

[0037] The principle of Bessel beam generation is as follows figure 2 As shown, the light beam passes through the axicon 4 and is divided into two beams of light. At the same time, the two beams of light have a certain angle and ...

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Abstract

The invention relates to a beam pointing control system based on an axicon and a deviation correction method thereof. The purpose of the present invention is to solve the technical problems that the existing beam pointing control system has a complex structure, and the deviation of the detector installation position and the interference of dust in the air have a great influence on the detection accuracy, and provides a beam pointing control system based on an axicon and its Bias correction method. The beam pointing control system based on the axicon and its deviation correction method provided by the present invention, the beam forms a Bessel beam after passing through the axicon, and can measure the angle offset and position offset of the laser beam respectively, and at the same time, because of the Bessel The light beam has the characteristics of no diffraction and long focal depth. The focal depth of the central focus is much longer than that of ordinary convex lenses, which makes the system less demanding on the accuracy of the installation position of the detector relative to the axicon, and the dust particles in the air interfere more with the detector. Small, more stable detection results; and simple structure, small size.

Description

technical field [0001] The invention relates to a beam pointing control system and a deviation correction method thereof, in particular to a deviation correction method of a beam pointing control system based on an axicon. Background technique [0002] Due to the non-contact nature of laser processing and the non-selectivity of materials, it can complete the manufacture of precision mechanical and optical components that cannot be completed by ordinary mechanical processing, and gradually covers more and more micro-nano pattern processing fields. Among them, femtosecond laser processing has the advantages of no recasting layer, no microcracks, and no recrystallization in the processing structure, which greatly reduces the mechanical stress and surface damage of the manufactured device. However, in the actual femtosecond laser micro-nano pattern processing process, the beam pointing drift inevitably exists in the processing system, which greatly hinders the ability of laser u...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/00G02B27/09G02B27/10G02B26/08
CPCG02B27/00G02B27/0938G02B27/108G02B26/0816
Inventor 李明张天
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI