[0032] The following will clearly and completely describe the technical scheme in the embodiment of the invention with reference to the drawings in the embodiment of the invention.
[0033] See Figure 2 There is shown a system 20 for automatically adjusting the position of the susceptor 12 relative to the preheating ring 11 in the epitaxial furnace 1 provided by the embodiment of the present invention, wherein, for the sake of clarity Figure 2 Only the preheating ring 11 and the pedestal 12 of the epitaxial furnace 1, as well as the rotation axis X of the pedestal 12 and the silicon wafer W carried on the pedestal 12 are shown. Other parts of the epitaxial furnace 1 can be referred to. Figure 1 To understand, such as Figure 2 The illustrated system 20 may include a laser measuring instrument 21, a controller 22 and a driving mechanism 23; Among them,
[0034] The laser measuring instrument 21 is configured to measure the measured relative position information between the base 12 and the preheating ring 11, and transmit the measured relative position information to the controller 22;
[0035] The controller 22 is configured to compare the measured relative position information with the reference relative position information when the base 12 is at the reference position relative to the preheating ring 11 to obtain a deviation between the measured relative position information and the reference relative position information, and is configured to generate a driving control instruction based on the deviation and send the driving control instruction to the driving mechanism 23 when the deviation is greater than a set threshold, wherein the driving control instruction is used to instruct the driving mechanism 23 to drive the base 12 relatively.
[0036] The driving mechanism 23 is configured to drive the base 12 according to the driving control instruction.
[0037] The system 20 provided by the embodiment of the invention realizes the automatic adjustment of the position of the base 12 relative to the preheating ring 11, does not need manual operation to control the driving device, greatly reduces the operation difficulty and time consumption, can be independently completed by a single person, and can quickly complete the adjustment operation, thus improving the efficiency of daily maintenance of equipment; Furthermore, the acquisition and transmission of the relative position information between the base 12 and the preheating ring 11, the deviation between the measured relative position information and the reference relative position information, the generation of the driving control command, the operation of the driving mechanism, etc. are all realized in a computerized manner, so that better adjustment accuracy can be obtained than manual operation.
[0038] In a preferred embodiment of the present invention, the measured relative position information is the measured height difference between the base 12 and the preheating ring 11, and correspondingly, the reference relative position information is the reference height difference between the base 12 and the preheating ring 11. See Figure 3 The height difference between the pedestal 12 and the preheating ring 11 may be the vertical distance between the upper surface of the pedestal 12 and the upper surface of the preheating ring 11. Generally, the deviation between the measured height difference and the reference height difference needs to be-1 0.2mm, or the deviation within this range is considered not to be greater than the set threshold.
[0039] In a preferred embodiment of the present invention, the measured relative position information is the measured clearance value between the base 12 and the preheating ring 11, and correspondingly, the reference relative position information is the reference clearance value between the base 12 and the preheating ring 11. See also Figure 3 The value of the gap between the pedestal 12 and the preheating ring 11 may be the distance in the horizontal direction between the radial outer periphery of the pedestal 12 and the radial inner periphery of the preheating ring 11. Generally, the deviation between the measured clearance value and the reference clearance value needs to be in the range of 2mm to 3mm, or the deviation within this range is considered not to be greater than the set threshold.
[0040] Although not shown in the drawings, in the preferred embodiment of the present invention, the system 20 may include a plurality of laser meters 21, and accordingly, the above-mentioned measured relative position information may be measured at a plurality of positions in the circumferential direction of the base 12. Preferably, the plurality of positions may be uniformly distributed in the circumferential direction of the base 12. For example, the system 20 may include three laser measuring instruments 21, which respectively measure the measured relative position information of three positions evenly distributed in the circumferential direction of the base 12, or the included angle of the three positions along the circumferential direction of the base 12 is 120.
[0041] It can be understood that the above measured relative position information can be measured without the base 12 rotating around the rotation axis X .. However, in the preferred embodiment of the present invention, the above-mentioned measured relative position information is measured when the base 12 rotates around the rotation axis X, so that the dynamic position of the base 12 can be adjusted.
[0042] It can be understood that in the above-mentioned embodiment, after the laser measuring instrument 21 measures the measured relative position information between the base 12 and the preheating ring 11, the position of the base 12 can be adjusted once with respect to the preheating ring 11, so the base 12 can be kept close to the reference position with respect to the preheating ring 11 through multiple measurements and adjustments until the deviation between the measured relative position information obtained by the controller 22 and the reference relative position information is less than or equal to the set threshold. In this case, the controller 22 can adopt a proportional-integral-differential (PID) control algorithm, and correspondingly change the PID gain parameters according to the deviation and the deviation change rate, so as to improve the stability of the dynamic process of the system 20.
[0043] In the preferred embodiment of the present invention, see Figure 4 The driving mechanism 23 may include:
[0044] A driver 231 fixedly arranged relative to the base of the epitaxial furnace 1, Figure 4 The base of the epitaxial furnace 1 is not shown, but the shaded area schematically shows that the driver 231 is fixedly arranged relative to the base;
[0045] The lower bell jar 232 is also fixedly arranged relative to the base of the epitaxial furnace 1, Figure 4 In the same way, the shaded area schematically shows that the lower bell jar 232 is fixedly arranged relative to the base, and a ball head 232B； is formed at the end of the lower bell jar 232 opposite to the base 12.
[0046] A supporting member 233 for supporting the base 12, the supporting member 233 being formed with a ball socket 233B； matched with the ball head 232B;
[0047]The driver 231 is configured to drive the support member 233 so that the base 12 can rotate along with the support member 233 around the ball head 232B in any direction.
[0048] In the preferred embodiment of the present invention, see also Figure 4 The support member 233 extends through the ball head 232B and has a first end 233C and a second end 233D located at both sides of the ball head 232B. The base 12 is supported at the first end 233C of the support member 233, and the driver 231 drives the second end 233D of the support member 233.
[0049] Specifically, as in Figure 4 As shown, the support member 233 may include a support shaft 233-1 and a motor 233-2 that drives the support shaft 233-1 to rotate, so that the base 12 can be driven to rotate. The support shaft 233-1 extends through the ball head 232B, and the end of the support base 12 of the support shaft 233-1 may serve as the above-mentioned first end 233C, and the above-mentioned ball socket 233B may be formed in the motor 233-2. A silicone rubber gasket (not shown in the drawings) may be provided between the ball head 232B and the ball socket 233B, so that the motor 233-2 is flexibly connected with the lower bell jar 232, and the bottom end of the motor 233-2 may serve as the second end 233D.
[0050] For example, in Figure 4 In the plane shown in, if the driver 231 drives the second end 233D of the support member 233 to the left, the gap between the preheating ring 11 and the pedestal 12 will increase and the height difference will decrease for the left part of the preheating ring 11 and the pedestal 12 in the figure, and correspondingly, the gap between the preheating ring 11 and the pedestal 12 will decrease and the height difference will increase for the right part of the preheating ring 11 and the pedestal 12 in the figure.
[0051] In the preferred embodiment of the present invention, see Figure 5 and Figure 6 The driver 231 includes a first driving motor 231A and a second driving motor 231B, and the second end 233D of the support member 233 is connected to the first driving motor 231A and the second driving motor 231B through a first ejector pin 234 and a second ejector pin 235, respectively, wherein, The first ejector pin 234 and the second ejector pin 235 are hinged to the second end 233D of the support member 233 at respective first hinge points 234A, 235A, and are hinged to the first driving motor 231A and the second driving motor 231B at respective second hinge points 234B, 235B, respectively, and the first driving motor 231A and the second driving motor 231B are configured to rotate parallel to each other. Figure 5 and Figure 6 Indicated by a dotted line in the middle) in directions perpendicular to each other (as in Figure 5 and Figure 6 Schematically shown by the middle arrow) drive the second hinge points 234B, 235B of the first ejector pin 234 and the second ejector pin 235, respectively.
[0052] In this way, by the first driving motor 231A and the second driving motor 231B driving the second hinge point 234B of the first ejector pin 234 and the second hinge point 235B of the second ejector pin 235 in a cooperative manner, the second end 233D of the support member 233 can be moved to any position in the plane parallel to the base 12, wherein Figure 6 The second end 233D is shown with respect to Figure 5 As shown in the figure, the base 12, together with the support member 233, can rotate around the ball head 232B in any direction, and finally the position of the base 12 relative to the preheating ring 11 can be adjusted.
[0053] In the preferred embodiment of the present invention, see Figure 5 and Figure 6 The first ejector pin 234 and/or the second ejector pin 235 are provided with a stopper ST, wherein Figure 5 and Figure 6 It is only exemplarily shown that the first ejector pin 234 is provided with a stopper ST, and the stopper ST is used for pressing against the opposite ejector pin (as in Figure 6 Shown in), in Figure 5 and Figure 6 The second ejector pin 235, which is the ejector pin opposite to the middle stopper ST, limits the moving range of the first ejector pin 234 and the second ejector pin 235 when being driven. Therefore, the damage to nearby components caused by the large-scale movement of the first ejector pin 234 and the second ejector pin 235 can be avoided, and accordingly, the movement of the base 12 can be limited to a certain range, and the damage to nearby components caused by the large-scale movement of the base 12 can be avoided.
