Depolarization compensation method for self-referencing interferometer prism

Abstract

The present disclosure provides a depolarization compensation method for a self-referencing interferometer prism, comprising: roof surface one, roof surface two, bottom surface one, roof surface three, roof surface four and bottom surface two as reflection surfaces in the self-reference interferometer prism A reflective film layer is coated on the top; according to the optical parameters of the reflective film layer, the refractive index is calculated; when the incident light is incident on the interface between the self-reference interferometer prism and the reflective film layer, it is decomposed into a P polarization component and an S polarization component. The refractive index of the film layer and the self-reference interferometer prism, calculate the phase difference and light intensity of the P polarization component and S polarization component of the outgoing light reflected in the self-reference interferometer prism; the ellipticity and light intensity of the outgoing light are used as evaluation parameters , to evaluate the depolarization compensation effect of the self-referencing interferometer prism. The disclosure provides a basis and practical operability for the optimization of reflective film layer parameters and effect evaluation by tracing the Jones matrix of polarized light and taking the ellipticity and light intensity of outgoing light as evaluation parameters.

Description

technical field [0001] The disclosure relates to the field of integrated circuit manufacturing, in particular to a depolarization compensation method for a self-referencing interferometer prism. Background technique [0002] Systems that use optical methods to achieve high-precision measurement of displacement and position, such as laser interferometer displacement measurement systems, grating interferometer displacement measurement systems, and phase grating position measurement systems, etc., are mostly based on polarized light interference methods to achieve high measurement accuracy, and Often a large number of polarizing optics are required. In this type of optical system, it is very important to strictly control the polarization state of each part of the optical path, which often involves the influence of more complex prisms such as corner cube prisms, Bechan prisms, and self-referencing interferometer prisms on the polarization state. [0003] For example, in a phase...

AI Technical Summary

Problems solved by technology

[0005] In the existing prism depolarization compensation method, there are often some disadvantages, such as the introduction of additional optical elements will lose the output light intensity, and it is difficult to realize the rotation of the prism or change the incident angle in some systems, and the solution of the polarization-maintaining film does not take into account the existing When there are multiple reflective surfaces and multiple reflections at different angles, the phase delay superposition between the reflective surfaces and the light intensity attenuation of the outgoing light have certain limitations.

Images