Depolarization compensation method of self-reference interferometer prism

Abstract

The invention provides a depolarization compensation method of a self-reference interferometer prism. The depolarization compensation method comprises the steps: plating a first ridge surface, a second ridge surface, a first bottom surface, a third ridge surface, a fourth ridge surface and a second bottom surface which serve as reflecting surfaces in the self-reference interferometer prism with reflecting surface film layers; calculating the refractive index of the reflective surface film layers according to the optical parameters of the reflective surface film layers; decomposing incident light into a P polarization component and an S polarization component when entering an interface of the self-reference interferometer prism and the reflective surface film layers, and calculating the phase difference and the light intensity generated by reflection of the P polarization component and the S polarization component of emergent light in the self-reference interferometer prism according tothe refractive indexes of the reflection surface film layers and the self-reference interferometer prism; and evaluating the depolarization compensation effect of the self-reference interferometer prism by taking the ovality and the light intensity of the emergent light as evaluation parameters. According to the invention, the Jones matrix of polarized light is used for tracing, the ovality and the light intensity of the emergent light are used as evaluation parameters, and thus the basis and the actual operability are provided for the optimization and effect evaluation of the parameters of the reflective surface film layers.

Description

technical field [0001] The disclosure relates to the field of integrated circuit manufacturing, in particular to a depolarization compensation method for a self-referencing interferometer prism. Background technique [0002] Systems that use optical methods to achieve high-precision measurement of displacement and position, such as laser interferometer displacement measurement systems, grating interferometer displacement measurement systems, and phase grating position measurement systems, etc., are mostly based on polarized light interference methods to achieve high measurement accuracy, and Often a large number of polarizing optics are required. In this type of optical system, it is very important to strictly control the polarization state of each part of the optical path, which often involves the influence of more complex prisms such as corner cube prisms, Bechan prisms, and self-referencing interferometer prisms on the polarization state. [0003] For example, in a phase...

AI Technical Summary

Problems solved by technology

[0005] In the existing prism depolarization compensation method, there are often some disadvantages, such as the introduction of additional optical elements will lose the output light intensity, and it is difficult to realize the rotation of the prism or change the incident angle in some systems, and the solution of the polarization-maintaining film does not take into account the existing When there are multiple reflective surfaces and multiple reflections at different angles, the phase delay superposition between the reflective surfaces and the light intensity attenuation of the outgoing light have certain limitations.

Images