Thermo-optical device and manufacturing method thereof
A manufacturing method and technology of optical devices, which are applied in the fields of instruments, optics, nonlinear optics, etc., can solve the problems of poor performance of thermo-optical devices and high heating power consumption of heating electrodes, and achieve the effects of low heating power consumption and improved heating efficiency
Pending Publication Date: 2021-03-26
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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[0003] However, during the working process of the existing thermo-optic devices, when the heating electrodes are used to heat the optical waveguide, the heating power consumption of the heating electrodes is high, which leads to poor performance of the thermo-optic devices.
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[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.
[0025] Various schematic views of embodiments of the invention are shown in the drawings, which are not drawn to scale. Therein, certain details have been exaggerated and certain details may have been omitted for the sake of clarity. The shapes of the various regions and layers shown in the figure, as well as their relative sizes and positional relationships are only exemplary, and may deviate due to manufacturing tolerances or technical limitations in practice, and those skilled in the art will Regions / layers with different shapes, sizes, and relative positions can be additionally designed as needed.
[0026] Hereinafter, the terms "first", "second", etc. are used ...
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Abstract
The invention discloses a thermo-optical device and a manufacturing method thereof, relates to the technical field of thermo-optical devices, and is used for reducing the heating power consumption when a heating electrode heats an optical waveguide and improving the working performance of the thermo-optical device. The thermo-optical device comprises a base which comprises a substrate, an opticalwaveguide and a heating electrode, wherein the optical waveguide and the heating electrode are formed on the substrate; the heating electrode is positioned above the optical waveguide; a first open slot penetrating through the substrate is formed in the substrate, and the first open slot is located below the optical waveguide; The thermo-optical device also comprises a low-heat-loss material, wherein the low-heat-loss material is disposed in the first open slot, wherein the heat conductivity coefficient of the low-heat-loss material is smaller than that of the substrate. The manufacturing method of the thermo-optical device is used for manufacturing the thermo-optical device.
Description
technical field [0001] The invention relates to the technical field of thermo-optic devices, in particular to a thermo-optic device and a manufacturing method thereof. Background technique [0002] The heating electrode is one of the very important components in thermo-optic devices. Specifically, when the heating electrode is energized, it can heat the optical waveguide located under the heating electrode. Based on the thermo-optic effect, the optical properties (such as the refractive index) of the heated optical waveguide will change, so as to realize the tuning of the transmission signal in the optical waveguide. [0003] However, in the working process of the existing thermo-optic device, when the heating electrode is used to heat the optical waveguide, the heating power consumption of the heating electrode is relatively high, which leads to poor working performance of the thermo-optic device. Contents of the invention [0004] The object of the present invention is...
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IPC IPC(8): G02F1/01
CPCG02F1/0147G02F1/0102
Inventor 杨妍唐波张鹏李彬刘若男李志华谢玲王文武
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI