Machining process for thin-wall annular part of IC equipment

A processing technology and parts technology, which is applied in the processing technology field of thin-walled ring parts of IC equipment, can solve problems such as difficulty in ensuring accuracy

Pending Publication Date: 2021-03-30
SHENYANG FORTUNE PRECISION EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This component plays a role in stabilizing the gas film pressure in the CMP equipment. It is difficult to guarantee the accuracy of the existing thin-walled annular parts.

Method used

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  • Machining process for thin-wall annular part of IC equipment
  • Machining process for thin-wall annular part of IC equipment
  • Machining process for thin-wall annular part of IC equipment

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0020] combined with Figure 1-4 The notations describe the invention in detail.

[0021] The present invention relates to a processing technology for thin-walled annular parts of IC equipment. The structure of the thin-walled annular part has strict requirements on thin plate welding and dimensional accuracy, and is a very typical welded special-shaped part.

[0022] The first step: clamping, the clamping depth is guaranteed to be about 20mm to ensure the clamping strength, and the extension is 88mm to ensure the follow-up processing process. And find out that the beating of the outer ring is 0.1. The inner diameter and outer circle of the lathe rough machining parts. Leave a margin of 2mm for the inner and outer diameters. One piece of material can process the length of 5 parts, and rough machine the end face.

[0023] The second step: heat treatment process, heat to 350-400 ℃, keep warm for 2-2.5h; cool to 120 ℃ with the furnace, and then use air cooling.

[0024] The ...

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Abstract

The invention relates to a machining process for a thin-wall annular part of IC equipment. Step I, the inner diameter and outer circle of a part are roughly machined through a machine tool. The 2 mm allowance is reserved for the inner diameter and the outer diameter. The length of five parts can be machined through one material, and the end face is roughly machined. Step II, heat treatment is performed. Step III, the end face, the outer circle and the inner hole are subjected to finish machining. A workpiece is cut off through a cut-off tool. Step IV, hot melt glue is adopted for fixation. Theouter circle R angle is subjected to finish machining in place. According t to the machining process, during rough machining, the allowance is reserved, and the reasonable allowance is reserved for finish machining. The roughness requirement is guaranteed in the machining process, and the influence of polishing on the part size is avoided. The part is fixed with the hot melt glue through a vertical lathe, and the R angle is subjected to finish machining.

Description

technical field [0001] The invention belongs to the technical field of machinery manufacturing. Specifically, it is a processing technology for thin-walled annular parts of IC equipment. Background technique [0002] With the rapid development and popularization of electronic integrated circuits and intelligent manufacturing, the demand for IC equipment is also increasing. This part plays a role in stabilizing the gas film pressure in the CMP equipment, and it is difficult to guarantee the precision in the processing of the existing thin-walled annular parts. Contents of the invention [0003] The object of the present invention is to provide a processing technology for thin-walled annular parts of IC equipment. [0004] In order to achieve the above object, the technical scheme adopted in the present invention is: [0005] A processing technology for thin-walled ring parts of IC equipment. The material of the ring parts is 316 steel, and the flatness of the upper and l...

Claims

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Application Information

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IPC IPC(8): B23P15/00
CPCB23P15/00
Inventor 郭月娥
Owner SHENYANG FORTUNE PRECISION EQUIP CO LTD
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