Photoelectric piezoelectric electrostatic composite driving micro-mirror fine adjustment device

Abstract

The invention discloses a photoelectric piezoelectric electrostatic combined drive micro-mirror fine adjustment device. The device comprises a coarse movement table; Y-direction sliding rails are symmetrically arranged on the coarse movement table; first sliding rods are arranged in the Y-direction sliding rails; the first sliding rods are in sliding connection with a Y-direction fine adjustment platform through first sliding blocks; A Y-direction adjusting mechanism is arranged below the Y-direction fine adjustment platform and located on the surface of the coarse movement table; the two endsof the Y-direction adjusting mechanism are fixedly connected to the surface of the coarse movement table through first fixing blocks; Y-direction photoelectric ceramics are symmetrically arranged below the Y-direction adjusting mechanism and located on the surface of the coarse movement table; light energy is converted into electric energy through the photo-generated voltage effect of the photoelectric ceramics; the electric energy is converted into mechanical energy through the inverse piezoelectric effect of a piezoelectric film on a piezoelectric film driver in the adjusting mechanism, sothat displacement adjustment can be achieved. The device is simple and compact, and higher in response speed.

Description

technical field [0001] The invention relates to the technical field of micro-mirror micro-adjustment driving, and specifically relates to a micro-mirror micro-adjustment device for photoelectric-voltage-electrostatic composite drive. Background technique [0002] Micromirrors are widely used in defense and civilian fields such as optical systems, micro-mechanical optical switches, precision measurement, medical imaging, biotechnology, and aerospace. In recent years, the modulation of the intensity and phase of the incident light and the gating of the optical path can be realized by equipping the micromirror with driving devices with different functions, so that the micromirror has functions such as optical switching and adaptive optics correction. The traditional micromirror table is driven by mechanical transmission such as precision screw pair and rolling guide rail, precision spiral wedge mechanism, turbine-concave mechanism, gear-lever mechanism, etc. Due to mechanical f...

AI Technical Summary

Problems solved by technology

The traditional micromirror table is driven by mechanical transmission such as precision screw pair and rolling guide rail, precision spiral wedge mechanism, turbine-concave mechanism, gear-lever mechanism, etc. Due to mechanical friction, clearance, crawling and other reasons, it is difficult to Successful one-time positioning often requires fine-tuning, and there are also defects such as insufficient adaptability to electric heating, electromagnetic and other driving forms. At the same time, it cannot be directly operated and controlled in a vacuum or in a specific operating environment. Therefore, we propose a photovoltage electrostatic Composite drive micromirror fine-tuning device

Images