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PVD continuous coating equipment and coating method

A coating equipment and coating cavity technology, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating, etc. The effect of good process consistency, labor cost saving and high production capacity

Pending Publication Date: 2021-04-09
广东谛思纳为新材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] At present, most of the stainless steel plate coating equipment is a single type equipment. Due to the large size of the stainless steel plate, only 2-3 pieces can be plated in each furnace, and the time is about 10 minutes, and the process of degassing and pumping is repeated for each furnace. , this process takes up 2 / 3 of the total time of each furnace, and the production capacity is low. It is also because the process of degassing in each furnace cannot guarantee the color consistency of batch products. The use of a lot of manpower leads to high labor costs

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  • PVD continuous coating equipment and coating method
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  • PVD continuous coating equipment and coating method

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Embodiment Construction

[0051] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0052] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation or position indicated by "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. The relationship is based on the orientation or positional relationship shown in the drawings, and is onl...

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Abstract

The invention provides PVD (physical vapor deposition) continuous coating equipment and a coating method. The PVD continuous coating equipment comprises a loading cavity, a first transition cavity, a coating cavity group, a second transition cavity, an unloading cavity and a conveying assembly, wherein vacuum isolation valves are arranged at an inlet of the loading cavity, a position between the loading cavity and the first transition cavity, a position between the first transition cavity and the coating cavity group, and a position between the coating cavity group and the second transition cavity, a position between the second transition cavity and the unloading cavity and an outlet of the unloading cavity, each cavity is provided with a corresponding vacuum pump set, and the loading cavity and the unloading cavity are each provided with an air escape valve. The PVD continuous coating equipment has the beneficial effects that the coating equipment with a multi-stage vacuum cavity structure is provided, so that the air exhaust / deflation time can be greatly shortened; a product continuously enters from one end of the equipment and is continuously output from the other end of the equipment, so that uninterrupted production is achieved, the capacity is high, and the product process consistency is good; and a manipulator is adopted for loading and unloading the product, so that the labor cost is saved, and the economic benefit of a factory is effectively improved.

Description

technical field [0001] The invention relates to the technical field of vacuum coating equipment, in particular to a PVD continuous coating equipment and a coating method. Background technique [0002] At present, most of the stainless steel plate coating equipment is a single type equipment. Due to the large size of the stainless steel plate, only 2-3 pieces can be plated in each furnace, and the time is about 10 minutes, and the process of degassing and pumping is repeated for each furnace. , This process takes up 2 / 3 of the total time of each furnace, and the production capacity is low. It is also because the process of degassing in each furnace cannot guarantee the color consistency of batch products. A lot of manpower is used, resulting in high labor costs. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a coating equipment and a coating method with a high degree of automation and sustainable production in vi...

Claims

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Application Information

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IPC IPC(8): C23C14/56
CPCC23C14/562
Inventor 邵海平刘莉云曹英朝
Owner 广东谛思纳为新材料科技有限公司
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