A kind of quartz tuning fork sensitive structure on-chip testing device and method

A technology of quartz tuning fork and sensitive structure, which is used in measurement devices, surveying and navigation, speed measurement by gyro effect, etc., can solve problems such as low detection efficiency, improve yield, avoid waste of process manpower and material resources, and avoid splintering The effect of craftsmanship

Active Publication Date: 2022-07-15
BEIJING AUTOMATION CONTROL EQUIP INST
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Problems solved by technology

[0005] The invention provides a quartz tuning fork sensitive structure on-chip testing device and method, which can solve the technical problem of low detection efficiency of the existing method

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  • A kind of quartz tuning fork sensitive structure on-chip testing device and method
  • A kind of quartz tuning fork sensitive structure on-chip testing device and method
  • A kind of quartz tuning fork sensitive structure on-chip testing device and method

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Embodiment Construction

[0047] It should be noted that the embodiments in the present application and the features of the embodiments may be combined with each other in the case of no conflict. The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0048] It should be noted that the terminology used herein is for the purpose of describing specific e...

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Abstract

The invention provides an on-chip testing device and method for a quartz tuning fork sensitive structure. The device utilizes a raised test position to provide space for the vibration of a quartz tuning fork chip after electrification, and simultaneously realizes the testing of the quartz tuning fork through vacuum adsorption and a spring pressing rod. The double fixation of the chip makes the quartz tuning fork chip more stable when placed on the test position, and the quartz tuning fork chip is fixed and does not move during the process of applying pressure and decompression to the quartz tuning fork chip by the probe, thus avoiding the probe head and the quartz The test part of the tuning fork chip is contacted and scratched; through the cooperation of the vacuum adsorption module and the probe module, the patch, key line and testing processes in the processing of the quartz tuning fork gyroscope can be completely simulated, and the processing quality of the quartz tuning fork chip can be accurately fed back. It is convenient for further research on the influence of the parameters of the quartz tuning fork chip. The device of the invention can automatically test on-chip and judge the electrical performance and quality of the quartz tuning fork chip, and realizes a breakthrough in the automatic on-chip testing of the quartz tuning fork chip.

Description

technical field [0001] The invention relates to the technical field of quartz tuning fork sensitive structure testing, in particular to an on-chip testing device and method for quartz tuning fork sensitive structures. Background technique [0002] The sensitive structural part in the quartz tuning fork gyroscope is the quartz tuning fork chip. The three-dimensional microstructure of the quartz tuning fork chip is complex, and the electrode distribution processing requirements are relatively high. The current detection method is: the processing of the quartz tuning fork microstructure substrate is completed -> through microscope inspection + visual inspection Preliminarily judge whether the structure electrode is in good condition --> break the qualified product after preliminary screening from the substrate (called splinter) --> patch and bond the quartz tuning fork chip from the splinter --> electrify the quartz tuning fork Whether the chip has basic functions. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5621
CPCG01C19/5621
Inventor 刘韧王汝弢梁文华
Owner BEIJING AUTOMATION CONTROL EQUIP INST
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