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Lamb wave resonator, and filter and electronic device provided with Lamb wave resonator

A Lamb wave resonator and electronic equipment technology, applied in electrical components, impedance networks, etc., can solve the problems of high implementation cost, high process difficulty, complex structure, etc., and achieve stray effect suppression, high Q value, and large bandwidth. Effect

Pending Publication Date: 2021-04-13
GUANGDONG CANCHIP TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this structure is too complex, and the process is difficult and costly to implement for the resonator required in the micron scale

Method used

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  • Lamb wave resonator, and filter and electronic device provided with Lamb wave resonator
  • Lamb wave resonator, and filter and electronic device provided with Lamb wave resonator
  • Lamb wave resonator, and filter and electronic device provided with Lamb wave resonator

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Embodiment Construction

[0044] The technical solutions of the present invention will be further specifically described below through the embodiments and in conjunction with the accompanying drawings. In the specification, the same or similar reference numerals designate the same or similar components. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the general inventive concept of the present invention, but should not be construed as a limitation of the present invention.

[0045] figure 1It is a perspective view of Lamb wave resonator 10 according to Embodiment 1 of the present invention. like figure 1 As shown, the Lamb wave resonator 10 includes a substrate 1 , a piezoelectric layer 2 , interdigital electrodes 3 and bus bars 4 . Wherein, the piezoelectric layer 2 is formed on the substrate 1 , the interdigital electrodes 3 are at least formed on the upper surface of the piezoelectric layer 2 , and the bus b...

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Abstract

A Lamb wave resonator of the present invention comprises: a substrate as an insulator; a piezoelectric layer arranged on the substrate; a plurality of upper electrodes provided on the upper surface side of the piezoelectric layer; and a plurality of lower electrodes provided on the lower surface side of the piezoelectric layer, each of the upper electrodes being at least partially embedded in the piezoelectric layer, each of the lower electrodes being not embedded in the piezoelectric layer, and according to the thickness of the entire upper electrode, an embedding ratio, which is a ratio of a thickness of a portion of the upper electrode embedded in the piezoelectric layer to a thickness of the entire upper electrode, being set to an embedding ratio capable of suppressing a parasitic mode of a lamb wave.

Description

technical field [0001] The invention relates to a Lamb wave resonator, a filter and electronic equipment equipped with the Lamb wave resonator, which can suppress the spurious mode of the Lamb wave in the Lamb wave resonator, thereby improving the electromechanical coupling coefficient. Background technique [0002] With the rapid development of today's wireless communication technology, the application of miniaturized portable terminal equipment is becoming more and more extensive, so the demand for high-performance, small-sized RF front-end modules and devices is also increasingly urgent. As the core component of the RF front-end, the filter's performance is related to the performance of the entire communication system. The performance of the filter depends on the performance of its resonator, therefore, the performance of the resonator is very important. [0003] At present, the widely used resonators mainly include surface acoustic wave resonator (SAW), bulk acoustic wa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02H03H9/145
CPCH03H9/02H03H9/145
Inventor 李红浪许欣柯亚兵
Owner GUANGDONG CANCHIP TECH CO LTD