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Preparation method, batch observation method and observation device of microstructure

A microstructure and electron microscopy technology, which is applied in the direction of measuring devices, preparation of test samples, and material analysis through optical means, can solve the problem of not being easy to distinguish the front or back of the cover glass, and achieve efficient observation and cumbersome optimization. Steps, time-reducing effects

Pending Publication Date: 2021-04-16
NINGBO UNIV +1
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Problems solved by technology

However, if the microstructure is prepared on a cover glass, it is not easy to distinguish whether the sample is on the front side or the back side of the cover glass

Method used

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  • Preparation method, batch observation method and observation device of microstructure
  • Preparation method, batch observation method and observation device of microstructure
  • Preparation method, batch observation method and observation device of microstructure

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Embodiment Construction

[0042] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0043] Such as figure 1 As shown, the preparation method of the microstructure in this embodiment comprises the following steps:

[0044] S1. Bond two pads at intervals above the glass slide. The pads used in this embodiment are two layers of adhesive tape. 3 along the width direction of the slide glass and bonded on the slide glass so that the distance between the two pads is 1-1.5 cm. Since the spacers have a certain thickness, a groove is formed between the two spacers on the glass slide, and then the photoresist solution 2 is dropped into between the two spacers. During operation, use a disposable dropper to draw a small amount of photoresist solution 2 and drop it on the center of the glass slide.

[0045] S2. Place the cover glass 1 across the two pads so that the cover glass 1 covers the photoresist solution 2. The cover glass 1 in t...

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Abstract

The invention relates to a preparation method of a microstructure, which comprises the following steps: preparing the microstructure on cover glass, and simultaneously preparing special mark patterns capable of distinguishing the front and back directions of the cover glass on the cover glass. According to the preparation method of the microstructure, the microstructure is prepared on the cover glass, the area is small and thin, the microstructure is convenient to move and place, and a basis is provided for observing the microstructure in batches. The special mark pattern facilitates accurate placement of the cover glass during subsequent observation of the microstructure. The invention further relates to a batch observation method of the microstructure, a plurality of cover glasses with the microstructure are placed on the sample table, and batch observation of the microstructure is achieved by moving the sample table. According to the microstructure observation method, the observation efficiency of the microstructure is improved. The invention further relates to an observation device of a microstructure, an equipment foundation is provided for achieving the microstructure observation method, batch observation of multiple microstructures can be achieved, and rapid and efficient observation of the microstructures is achieved.

Description

technical field [0001] The invention relates to a preparation method of a microstructure, and also relates to a batch observation method and an observation device of the microstructure. Background technique [0002] In recent years, with the rapid development of technology in the fields of microelectromechanical systems, optical imaging, and medical microscopy, microstructures have been used in various fields more and more widely, and microstructures have gradually attracted people's attention. In the process of preparing samples using femtosecond laser two-photon polymerization technology, microstructures are generally prepared on glass slides. The preparation of microstructures on glass slides has disadvantages such as low efficiency, many consumables, and difficulty in being used for other researches. There are many advantages if you choose to fabricate microstructures on coverslips. For example, in biological detection, if you need to immerse the microstructures in diffe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/28G01N1/30G01N21/84
Inventor 徐泽宇陶卫东龚逸枫黄灵慧余玲燕贺正毅陈从林陈显兵孟祥俊
Owner NINGBO UNIV
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