Method and apparatus for treating discharge gas containing target gas in plasma state

A plasma and exhaust gas technology, applied in the field of target gas conversion rate, can solve the problems of shortening life, increasing maintenance costs, increasing the number of operation interruptions, etc., and achieves the effects of increasing life, reducing maintenance costs, and reducing consumption.

Pending Publication Date: 2021-04-16
普拉斯尼克斯
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, when thermal plasma is operated with high power, in addition to power consumption, the life of the structural parts (such as electrodes) of the plasma generator is shortened, so there is a problem of frequent replacement, which increases the number of operation interruptions and increases maintenance costs. shortcoming

Method used

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  • Method and apparatus for treating discharge gas containing target gas in plasma state
  • Method and apparatus for treating discharge gas containing target gas in plasma state
  • Method and apparatus for treating discharge gas containing target gas in plasma state

Examples

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Embodiment

[0077] figure 1 This is a conceptual diagram of an apparatus for processing an exhaust gas containing a target gas in a plasma phase according to an embodiment of the present invention. The exhaust gas treatment device 10 is roughly composed of a main body 20 , a heat exchanger 30 and a conduit 35 , a plasma generation device 40 , a water tank 50 , a wet scrubber 60 , and an atomizer M10 . The exterior of the main body 20 is thermally insulated.

[0078] The exhaust gas A containing the target gas flows in through the exhaust gas introduction port 21 containing the target gas. After the reforming agent N whose supply rate is adjusted by the quantitative supply device N2 is injected through the reforming agent supply port 22 provided in the exhaust gas introduction port 21 containing the target gas, it is mixed with the exhaust gas A containing the target gas, and the mixture is After the in-line heat exchanger 30 of the stage has passed through the conversion zone, the waste...

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PUM

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Abstract

The present invention relates to a method and apparatus for treating a discharge gas containing a target gas in a plasma state, the method comprising the steps of: generating a plasma in a conversion region in which the conversion of the target gas occurs; supplying, to the conversion region, a conversion promoting agent containing a conversion promoting element of which the first ionization energy is not greater than 10eV for promoting the conversion of the target gas; supplying, to the conversion region, a conversion agent that produces conversion products by combining with the dissociation products of the target gas and prevents the dissociation products from recombining into the target gas; and supplying the exhaust gas containing the target gas to the conversion region. The method increases the conversion rate of the target gas contained in the exhaust gas and reduces the energy consumption required in the process.

Description

technical field [0001] The present invention relates to a method and device for treating exhaust gas containing target gas in plasma phase, and more particularly to a method for improving the conversion rate of target gas contained in exhaust gas, and in the process, reducing the consumption of required energy . Background technique [0002] Currently, various kinds of harmful gases are discharged from the manufacturing processes in various industrial fields. In particular, in the manufacturing process of semiconductors, flat panel displays, light-emitting diodes, solar cells, etc., after the process, the exhaust gas contains global warming gases, ozone-depleting gases, toxic gases, explosive gases, flammable gases, etc., which are harmful to the human body and the environment. A large amount of harmful gas is appropriately converted into other substances and treated, thereby reducing the discharge amount. Among the gases to be converted (hereinafter referred to as target ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/32H01J37/32
CPCB01D53/32Y02C20/30H01J37/32844H01J37/32834H01J37/3288H05H1/48H05H1/482H05H2245/80B01D53/68B01D2257/204B01D2257/206B01D2259/818B01D2251/102B01D2251/202B01D53/343B01D53/48B01D53/54B01D53/70B01D53/78B01D2257/2066B01D2257/30B01D2257/40B01J19/088B01J2219/0805
Inventor 白光铉周元泰张润相
Owner 普拉斯尼克斯
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