Composite preparation method of high-density coating
A coating and dense technology, applied in coating, metal material coating process, gaseous chemical plating, etc., can solve the problems of substrate material damage, unrealistic, low preparation rate, etc.
Inactive Publication Date: 2021-04-30
LANZHOU INST OF PHYSICS CHINESE ACADEMY OF SPACE TECH
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AI-Extracted Technical Summary
Problems solved by technology
The invention discloses a composite preparation method of a high-density coating. The method adopts a manner of alternately preparing atomic layer deposition and chemical vapor deposition to finish the preparation of the high-density coating, and utilizes the high density of an atomic layer deposition coating to block defects such as cracks, micropores and the like in the chemical vapor deposition coating, heredity and development of various defects are prevented, so that the coating has the favorable barrier property, and meanwhile, the defect of low atomic layer deposition efficiency is overcome. The method can be used for preparing the coating with a high requirement on the compactness of the coating and larger thickness. The problem that a high-density coating prepared by purely adopting a chemical vapor deposition technology at present fails due to defects is solved.
Chemical vapor deposition coating
CrazingHigh density +3
- Experimental program(3)
Description & Claims & Application Information
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