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Planar array capacitance imaging sensor

An imaging sensor and planar array technology, which is applied in the direction of material capacitance, instruments, scientific instruments, etc., can solve the problems affecting the capacitance value, etc., and achieve the effect of reducing distance and angle errors and achieving the best imaging effect

Active Publication Date: 2021-04-30
CIVIL AVIATION UNIV OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Existing planar capacitive sensors mainly use scanning to obtain the distribution of the medium in the entire field, but the changes in angle and distance generated during the movement will affect the observation Capacitance value

Method used

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  • Planar array capacitance imaging sensor
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  • Planar array capacitance imaging sensor

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] Such as Figure 1 to Figure 3 As shown, the main body of the sensor includes 1-1 insulating protective layer, 1-2 measuring electrode, 1-3 outer ring shield, 1-4 insulating substrate, 1-5 excitation electrode, 1-6 bottom shield, and the sensor is from top to bottom They are the insulating protection layer, the measuring electrode including the outer ring shield, the insulating substrate, the excitation electrode including the outer ring shielding, the insulating substrate and the bottom shielding. The excitation electrode and the measurement electrode are located on different planes, the measurement electrode is close to the insulating protection layer, and the excitation electrode is away from the insulation protection layer. The outside of the same plane as the excitation electrode and the measurement electrode has an outer ring shield that matches the shape of the electrode.

[0031] A single excitation and measurement channel is formed by connecting rectangular rec...

Embodiment 2

[0038] Such as Figures 4 to 6 As shown, from top to bottom, the sensor includes an insulating protective layer 2-1, an excitation electrode 2-5, a measuring electrode 2-2, an outer ring shield 2-3, an insulating substrate 2-4, and a bottom shield 2-6. The excitation electrode 2-5, the measurement electrode 2-2 and the outer shield 2-3 are located on the same plane, and the outer shield 2-3 is similar to that of Embodiment 1.

[0039] Different from Embodiment 1, in this embodiment, the excitation and measurement channels are located on the same plane, and there is no separate layer of insulating substrate between the excitation and measurement electrodes. A single excitation and measurement channel is a square on the same plane rotated by 45 degrees, and then connected by a metal column that is deep in the -z direction and a metal wire that extends horizontally and vertically. The angle between the excitation and measurement channels is 90 degrees. Such as Figure 5 , in or...

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Abstract

The invention discloses a planar array capacitance imaging sensor. The sensor comprises an excitation electrode, a measuring electrode, an insulating substrate, a peripheral shield and a bottom shield and an insulating protective layer, the excitation electrode, the measuring electrode, the peripheral shield, the bottom shield and the insulating protective layer are printed on the insulating substrate, and the insulating protective layer is printed on the upper surface of the insulating substrate; and the bottom shield is printed on the lower surface of the insulating substrate. The excitation electrode and the measuring electrode are spaced by thin insulating substrates, or the excitation electrode and the measuring electrode are laid in a crossed mode and located on the same plane close to the insulating protective layer. The beneficial effects of the sensor are that the sensor can achieve a better imaging effect under the condition that the influence of distance and angle errors caused by movement is reduced.

Description

technical field [0001] The invention belongs to the technical field of capacitance imaging sensors, in particular to an array capacitance imaging sensor. Background technique [0002] For object detection and damage detection, especially when the dielectric constant of the medium is anisotropic, the damage mechanism is very complicated, it is difficult to accurately estimate and measure, and the detection is usually only one-sided operation, which is difficult to implement in traditional electrical tomography. Therefore, the research on planar capacitive imaging technology is of great significance. [0003] Planar Array Capacitance imaging (PACI) obtains a set of column capacitance measurement values ​​according to the electrode array distributed in the same plane, and uses the relationship between the dielectric constant ε of the measured medium and the distribution of the medium to reconstruct the distribution of the medium. Images have a wide range of application scenari...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/24G01N27/22
CPCG01N27/24G01N27/226
Inventor 范文茹王驰
Owner CIVIL AVIATION UNIV OF CHINA