Amplified area array sweep frequency ranging/thickness measuring device and method with active optical anti-shake function

Abstract

The invention discloses an amplified area array sweep frequency ranging / thickness measuring device with an active optical anti-shake function, and relates to the field of laser sweep frequency ranging. The device comprises a first dichroscope, a second dichroscope, a beam splitter, a lens, a camera, a spectrograph, an acquisition control unit and a movable reflection device;a beam splitter is arranged in the transmission light direction of the first dichroscope; an objective table is arranged in the reflected light direction of the beam splitter, a lens is arranged between the objective table and the beam splitter, the beam splitter is provided with four ports, the first port directly faces the first dichroscope, the second port directly faces the lens, the third port directly faces the movable reflection device, the fourth port directly faces the second dichroscope, and a camera is arranged in the light transmission direction of the second dichroscope. The camera is connected with the collection control unit, the spectrograph is arranged in the reflected light direction of the second dichroscope, the spectrograph is communicated with the collection control unit, and the collection control unit has the functions of collecting signals of the camera and the spectrograph and displaying data. The device is simple in structure, rapid in measurement and high in measurement precision.

Description

technical field [0001] The invention belongs to the field of laser frequency scanning distance measurement, and more specifically relates to a device and method for frequency scanning distance measurement / thickness of an enlarged area array with an active optical anti-shake function. Background technique [0002] In modern industrial production, the precision of parts processing has become more and more the key to high-performance equipment. It is very important to accurately and stably produce the required parts of specific size and shape. Therefore, accurate detection of the produced parts is an important link to ensure high-quality production. [0003] In the existing technology, the application number is 201910648603.5, which discloses a patent application titled "a three-dimensional coordinate measurement system and measurement method for the surface of an object". The interference signal between the lasers returned by the arm is analyzed and processed to obtain the de...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the defects of the prior art, the object of the present invention is to provide an amplified area array scanning ranging / thickness device with an active optical anti-shake function, aiming at solving the problem of measuring several millimeters to tens of microns in the prior art. The device and method of thickness or distance have the problems of slow measurement speed and low measurement accuracy. The device of the present invention has simple structure, fast measurement and high measurement accuracy.

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