The invention discloses an area array scanning
ranging / thickness device with an active optical anti-shake function, belonging to the field of
ranging / thickness, including first and second dichroic mirrors, a
beam splitter, a
telecentric lens, a camera, A
spectrometer, an acquisition
control unit and a movable reflective device, a
beam splitter is arranged in the
transmitted light direction of the first dichroic mirror, an object stage is arranged in the reflected light direction of the
beam splitter, and a movable beam splitter is arranged in the
transmitted light direction The reflective device, the beam splitter has four ports, the first port and the third port are located on two opposite sides, the first port faces the first dichroic mirror, the second port faces the stage, and the third port Facing the movable reflector, a second dichroic mirror is arranged in the direction of the fourth port, a
telecentric lens is arranged in the direction of the
transmitted light of the second dichroic mirror, the
telecentric lens is connected with a camera, and the second dichroic mirror A
spectrometer is arranged in the direction of the reflected light, and the
spectrometer is connected to the acquisition
control unit. The device of the invention has the advantages of simple structure, quick measurement and high
measurement precision.