The invention discloses an area array scanning 
ranging / thickness device with an active optical anti-shake function, belonging to the field of 
ranging / thickness, including first and second dichroic mirrors, a 
beam splitter, a 
telecentric lens, a camera,  A 
spectrometer, an acquisition 
control unit and a movable reflective device, a 
beam splitter is arranged in the 
transmitted light direction of the first dichroic mirror, an object stage is arranged in the reflected light direction of the 
beam splitter, and a movable beam splitter is arranged in the 
transmitted light direction  The reflective device, the beam splitter has four ports, the first port and the third port are located on two opposite sides, the first port faces the first dichroic mirror, the second port faces the stage, and the third port  Facing the movable reflector, a second dichroic mirror is arranged in the direction of the fourth port, a 
telecentric lens is arranged in the direction of the 
transmitted light of the second dichroic mirror, the 
telecentric lens is connected with a camera, and the second dichroic mirror  A 
spectrometer is arranged in the direction of the reflected light, and the 
spectrometer is connected to the acquisition 
control unit.  The device of the invention has the advantages of simple structure, quick measurement and high 
measurement precision.