Device and method for area array frequency scanning distance measurement/thickness with active optical anti-shake function

Abstract

The invention discloses an area array scanning ranging / thickness device with an active optical anti-shake function, belonging to the field of ranging / thickness, including first and second dichroic mirrors, a beam splitter, a telecentric lens, a camera, A spectrometer, an acquisition control unit and a movable reflective device, a beam splitter is arranged in the transmitted light direction of the first dichroic mirror, an object stage is arranged in the reflected light direction of the beam splitter, and a movable beam splitter is arranged in the transmitted light direction The reflective device, the beam splitter has four ports, the first port and the third port are located on two opposite sides, the first port faces the first dichroic mirror, the second port faces the stage, and the third port Facing the movable reflector, a second dichroic mirror is arranged in the direction of the fourth port, a telecentric lens is arranged in the direction of the transmitted light of the second dichroic mirror, the telecentric lens is connected with a camera, and the second dichroic mirror A spectrometer is arranged in the direction of the reflected light, and the spectrometer is connected to the acquisition control unit. The device of the invention has the advantages of simple structure, quick measurement and high measurement precision.

Description

technical field [0001] The invention belongs to the field of laser frequency scanning distance measurement / thickness, and more particularly relates to an area array frequency scanning distance measurement / thickness device and method with an active optical anti-shake function. Background technique [0002] In modern industrial production, the precision of parts processing has become more and more the key to high-performance equipment. It is very important to accurately and stably produce the required parts of specific size and shape. Therefore, accurate detection of the produced parts is an important link to ensure high-quality production. [0003] In the existing technology, the application number is 201910648603.5, which discloses a patent application titled "a three-dimensional coordinate measurement system and measurement method for the surface of an object". The interference signal between the lasers returned by the arm is analyzed and processed to obtain the depth of t...

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Problems solved by technology

[0006] Aiming at the defects of the prior art, the object of the present invention is to provide a device and method for area array frequency scanning ranging / thickness measurement with active optical anti-shake function, aiming at solving the problem of measuring tens of millimeters to tens of microns in the prior art. The device and method of thickness or distance have the problems of slow measurement speed and low measurement accuracy. The device of the present invention has simple structure, fast measurement and high measurement accuracy.

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