A three-dimensional topography restoration method based on color confocal parallel measurement based on image processing
A three-dimensional topography and image processing technology, applied in the field of image processing, can solve the problems of inability to process multiple images and low measurement accuracy, and achieve the effects of improving measurement accuracy, avoiding image noise, and improving processing speed.
Active Publication Date: 2022-08-05
HUAQIAO UNIVERSITY
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[0005] What the present invention aims to solve is the problem that the existing technology cannot perform image processing on multiple images and multiple measured object points, and the influence of stray light and interference light is easily introduced in the image processing process, and the problem of low measurement accuracy
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[0036] In order to better understand the technical solutions of the present invention, the embodiments of the present invention are described in detail below with reference to the accompanying drawings.
[0037] In the embodiment of the present invention, on the basis of using a color confocal parallel measurement device to monitor the focused light reflection at each position on the surface of the sample object, and combining a color camera as a sensor to collect images, a color confocal parallel measurement based on image processing is invented. The method of measuring the three-dimensional topography restoration is to use a computer carrier to restore the three-dimensional topography of the object surface on the collected images.
[0038] see figure 1 The present invention provides a general flow chart of a method for restoring three-dimensional topography based on color confocal parallel measurement based on image processing, and figure 2 The provided image stitching alg...
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The invention provides a three-dimensional topography restoration method based on color confocal parallel measurement based on image processing. The algorithm first performs target extraction and image splicing for multiple images obtained by a line scanning parallel color confocal system to obtain the stitched image that needs to be processed. Second, the connected area of the centroid of each measured point is obtained through morphological processing and centroid extraction algorithm; finally, the “H value-height” conversion is performed on the connected area of the centroid of each measured point in the stitched image, according to the H value to the height of the corresponding measured point, and then combined with the interpolation fitting algorithm to reconstruct the three-dimensional topography of the object surface. The algorithm of the present invention uses a mask to perform image matting to avoid the influence of image noise caused by stray light and defocused light, and can accurately extract the target light spot area to be processed, thereby improving the processing accuracy. The application also greatly shortens the processing time and improves the processing efficiency to a certain extent.
Description
technical field [0001] The invention relates to the field of image processing in optical detection, in particular to an image processing-based color confocal parallel measurement three-dimensional topography restoration method. Background technique [0002] When using a color confocal parallel measurement device combined with a color camera as a sensor to collect images, the influence of stray light and defocused light is often encountered in the image processing process. Due to the different image quality of each collected image, it is difficult to identify at one time. The centroid of all light spots is used to locate, extract and process the target measured point. Especially in the process of parallel measurement, the number of collected images is relatively large, the processing time is long, and the processing efficiency is low. [0003] In the patent application "A Color Confocal Three-dimensional Topography Measurement Method and System" with the application publicat...
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IPC IPC(8): G06T17/00G06T3/40G06T7/187G06T7/155G06T7/11G06T7/66G06T5/00G06T5/30
CPCG06T17/00G06T3/4038G06T3/4007G06T7/187G06T7/155G06T7/11G06T7/66G06T5/30G06T2207/20132G06T2207/10024G06T2207/20192G06T5/70
Inventor 余卿张雅丽程方王寅尚文键王翀董声超肖泽祯
Owner HUAQIAO UNIVERSITY