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Waste gas separation and treatment apparatus and control method therefor

A technology for separation treatment and exhaust gas, which is applied in separation methods, gas treatment, and separation of dispersed particles. It can solve problems such as difficult waste management, reduced durability, and reduced operating efficiency, and achieve improved treatment efficiency, improved operation rate, and Effect of preventing powder from solidifying or forming

Active Publication Date: 2021-04-30
茶山有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005]However, in the exhaust gas treatment device of the prior art, the powder generated during the thermal decomposition of the exhaust gas is fixed inside the chamber, so that the operating efficiency is reduced and at the same time Technical issues with significantly reduced durability
[0006] Also, it is difficult to manage waste, including fines, since there is no structure to additionally trap fines

Method used

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  • Waste gas separation and treatment apparatus and control method therefor
  • Waste gas separation and treatment apparatus and control method therefor
  • Waste gas separation and treatment apparatus and control method therefor

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Embodiment Construction

[0031] Hereinafter, the exhaust gas sorting and separation treatment device 1 according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First of all, it should be noted that the same components or components in the drawings are denoted by the same reference numerals as far as possible. In order not to obscure the gist of the present invention, detailed descriptions related to related known functions or components are omitted when describing the present invention.

[0032] refer to figure 1 According to an embodiment of the present invention, the exhaust gas sorting and separation treatment device 1 is generally composed of an exhaust gas separation unit 100, a heating box unit 200, a scraper unit unit 300, a wet cleaning treatment unit 400, a first waste storage box 500 and a second waste disposal unit. Object storage box 600 forms.

[0033] First, the exhaust gas separation unit 100 will be described. Such ...

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Abstract

The present invention can separate waste gases according to whether they are corrosive or non-corrosive to perform pyrolysis treatment thereof individually, wherein powder fixed to a heating module and a chamber is removed to increase operation efficiency and equipment durability, and the collected powder can be externally discharged even during operation.

Description

technical field [0001] The present invention relates to an exhaust gas sorting and separation processing device, more specifically, it relates to receiving and linking main equipment signals, sorting and separating corrosive and non-corrosive exhaust gases and performing thermal decomposition treatment separately, and by removing the heating module and cavity The powder fixed on the chamber improves the operating efficiency and the durability of the equipment, and the collected powder can be discharged to the external waste gas sorting and separation processing device even during operation. Background technique [0002] Generally, corrosive and non-corrosive waste gases discharged from LCD and semiconductor manufacturing processes or chemical processes, such as perfluorinated compound (PFC: Perfluorocompound) gases, should be harmlessly treated before being discharged into the atmosphere. [0003] In order to perform detoxification treatment, it is necessary to perform dry a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/00B01D53/14B01D53/18B01D47/06B08B9/087
CPCB01D53/00B01D53/005B08B9/087B01D53/1431B01D53/18B01D47/06B01D2252/103B01D2258/0216B01D53/78B01D53/346B01D47/063B01D2247/10
Inventor 申奉锦赵诚旭
Owner 茶山有限公司
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