Hydrogen and humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application

A humidity sensor and sensor technology, which is used in measuring devices, converting sensor outputs, and using optical devices to transmit sensing components, etc., can solve the problems of low device integration, large equipment volume and high cost, and achieve good light source fluctuation and practicality. Strong and resistant effect

Pending Publication Date: 2021-05-04
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, most of the current sensors are for single-index monitoring, and the device integration is not high. Faced with multi-component monitoring in complex environments, sensors with different functions are often required, and the cost is high and the equipment volume is too large.

Method used

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  • Hydrogen and humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application
  • Hydrogen and humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application
  • Hydrogen and humidity integrated sensor, hydrogen humidity detection device based on self-reference technology and application

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Experimental program
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Effect test

Embodiment 2

[0034] The present embodiment is the further optimization carried out on the basis of embodiment 1, and it is specifically as follows:

[0035] Such as figure 1 As shown, the hydrogen sensitive film 11 is made of WO 3 - Composition of three-layer composite film composed of four materials: PdPt-PTFE.

[0036] Going a step further: WO 3 Layer as a hydrogen sensitive layer, its thickness is 10nm ~ 1500nm;

[0037] The PdPt layer is used as a catalytic layer, the atomic ratio of Pd and Pt in this layer is 1: (1~20), and the thickness is 20-750nm;

[0038] The PTFE layer is used as a protective layer, and its thickness is 20nm-750nm.

Embodiment 3

[0040] The present embodiment is the further optimization carried out on the basis of embodiment 1 or 2, and it is specifically as follows:

[0041] Such as figure 1 As shown, the humidity sensitive film 10 is composed of polyimide film, and its thickness is 10 μm˜150 μm.

Embodiment 4

[0043] The present embodiment is the further optimization carried out on the basis of embodiment 1 or 2 or 3, and it is specifically as follows:

[0044] Such as figure 1 As shown, the center wavelength difference between the reference grating 8 and the sensing grating 9 is 5-20 nm, the reference grating 8 is a long-wavelength grating, and the sensing grating 9 is a short-wavelength grating.

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Abstract

The invention relates to a hydrogen and humidity integrated sensor, which is formed by integrally packaging a hydrogen sensor probe and a humidity sensor probe, and the hydrogen sensor probe is composed of a single-mode optical fiber with a hydrogen sensitive film deposited on the end face and a reference grating; the humidity sensor probe consists of a sensing grating of which the side surface is coated with a humidity sensitive film and a reference grating; and the reference grating in the hydrogen sensor probe and the reference grating in the humidity sensor probe are the same grating. The detection device based on the self-reference technology comprises an upper computer, a sensing light source, a demodulator, an optical attenuator, a coupler and a sensor. The device is applied to monitoring of hydrogen concentration and environmental humidity in special environments of energy and national defense. The intensity and wavelength of the same reference grating are adopted to compensate interference in the hydrogen measurement process and the humidity measurement process respectively, the hydrogen concentration and the environment humidity are accurately measured at the same time, it is guaranteed that the hydrogen concentration and the environment humidity do not interfere with each other during measurement, and sensitivity and stability are high.

Description

technical field [0001] The present invention relates to the cross field of optical fiber sensing technology, material science and optoelectronic technology, relates to the preparation of functional materials and photoelectric detection technology, and specifically relates to a hydrogen humidity integrated sensor and a hydrogen humidity detection device and application based on self-referencing technology. Background technique [0002] Hydrogen energy is considered to be one of the most promising green renewable energy sources in the future society. With the wide application of hydrogen in the energy field, the demand for hydrogen sensors is increasing day by day, and the research on hydrogen sensors has attracted widespread attention. At the same time, humidity also has a vital impact on production and life. Material storage, animal husbandry, storage and maintenance of weapons, ammunition and machines must strictly control humidity, and humidity sensors have been constantl...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/55G01N21/17G01D5/353
CPCG01D5/35354G01N21/17G01N21/55
Inventor 杨明红叶壮代吉祥侯家栋李溢黄清熊灵犀
Owner WUHAN UNIV OF TECH
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