Semiconductor temperature control device and control method thereof

Abstract

The invention provides a semiconductor temperature control device and a control method thereof. The device comprises a compression refrigeration unit, a circulation liquid unit and a secondary refrigerant unit, the circulation liquid unit comprises a plurality of circulation liquid channels, the compression refrigeration unit comprises an evaporator, and the secondary refrigerant unit comprises a secondary refrigerant water tank, a plurality of heat exchangers and a plurality of three-way valves; each circulation liquid channel comprises a circulation liquid water tank, the heat exchangers and the three-way valves are arranged in a one-to-one correspondence mode, an outlet of the secondary refrigerant water tank communicates with secondary refrigerant inlets of the multiple heat exchangers through branch pipelines at the same time, and first water inlets of the three-way valves communicate with corresponding branches in the branch pipelines; and second water inlets of the three-way valves are connected with secondary refrigerant outlets of the heat exchangers, outlets of the three-way valves are connected with a secondary refrigerant inlet of the evaporator, a secondary refrigerant outlet of the evaporator is connected with the secondary refrigerant water tank, circulation liquid outlets of the heat exchangers communicate with the circulation liquid water tanks, and circulation liquid inlets of the heat exchangers are used for communicating with a circulation liquid return pipeline. The temperature control precision of the circulation liquid channel is improved; and the energy consumption is low.

Description

technical field [0001] The invention relates to the technical field of semiconductor refrigeration, in particular to a semiconductor temperature control device and a control method thereof. Background technique [0002] In the semiconductor production process, temperature control equipment is commonly used as auxiliary manufacturing equipment for etching, physical vapor deposition, chemical vapor deposition and other processing processes. In these processes, it is necessary to provide high-precision and stable circulating fluid inlet temperature. [0003] If a single refrigeration unit is used to control multiple media or objects with independent target temperatures, since the operating temperature range of each channel may be different, it is now mostly to set up multiple completely independent compressor systems or through one compressor and multiple expansion valves Work together to achieve multiple independent temperature control. However, the use of multi-channel comp...

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Problems solved by technology

[0004] The present invention provides a semiconductor temperature control device and its control method, which are used to solve the defect that in the prior art, when multiple independent temperature controls are prone to unstable operation or out of control, resulting in low temperature control accuracy

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