High-temperature forming device for imperfect single crystal germanium wafer

Abstract

The invention discloses a high-temperature forming device for an imperfect single crystal germanium wafer. The high-temperature forming device is composed of a heating electric furnace, a temperature control system, a mold system, a loading system, a vacuum protection system, an operation table and an auxiliary system. A hearth of the heating electric furnace is cylindrical, a furnace opening faces downwards, and the hearth has the vertical lifting or opening and closing function. The vacuum system is composed of a glass cover, a blocking flange, a glass cover supporting plate, a vacuum pump and accessories of the vacuum pump. A bending die, a finishing die and a flattening die are arranged in the glass cover. By operating gloves, a rotating rod and a clamp, operations such as shifting and overturning of the single crystal wafer can be completed in a high-temperature vacuum environment. The high-temperature forming device is simple in principle, greatly simplifies the production process of the imperfect single crystal wafer, and improves the production efficiency.

Description

technical field [0001] The invention belongs to a high-temperature forming device for a germanium sheet, in particular to a high-temperature forming device for an imperfect single-crystal germanium sheet. Background technique [0002] The slow neutrons provided by reactors and accelerators usually have a continuous energy spectrum, while neutron scattering experiments must provide "monochromatic neutrons" in a very narrow specific wavelength range. Using the Bragg coherent scattering of crystals to obtain the required "monochromatic neutrons" from a white light neutron source through reflection and transmission, this is the most commonly used method for neutron scattering spectrometers. The neutron monochromator uses the Bragg reflection of the crystal to form the required "monochromatic neutron". Therefore, the neutron monochromator is a common neutron optical component on the neutron scattering spectrometer, which has an important impact on the resolution of the spectrome...

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Problems solved by technology

Since the germanium sheet needs to be deformed at high temperature in a vacuum environment, each station can only complete one deformation process, and each process requires germanium sheet loading, vacuum protection, heating, forming, and cooling. The equipment is designed with multiple station, the production process is long and the production efficiency is low

At the same time, in the existing production method, after the germanium sheet is bent and formed, two flat molds are used to directly flatten the germanium sheet, which will lead to different deformation degrees of the germanium sheet during this process, and the mosaic degree of the imperfect single crystal germanium sheet It will produce unevenness in the plane, reduce the consistency of the performance of the round germanium wafer, and may even affect the performance of the neutron monochromator

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