Modulation method and device for atmospheric pressure gas discharge homogenization

Abstract

The invention relates to the technical field of atmospheric pressure gas uniform discharge, and provides a modulation method and device for atmospheric pressure gas discharge homogenization. The method comprises the following steps: driving a gas to discharge by using an alternating current power supply, and adjusting parameters of the alternating current power supply to homogenize gas discharge; and / or, using a pulse power supply to drive the gas to discharge, and adjusting the parameters of the pulse power supply to homogenize the gas discharge. On the basis of mastering dominant factors and internal mechanisms for generating non-uniform gas discharge, the discharge non-uniformity is eliminated by properly adjusting the alternating current or a pulse power supply in the form of dielectric barrier discharge, the atmospheric pressure gas discharge homogenization is realized, the method is simple, and the cost is low.

Description

technical field [0001] The invention relates to the technical field of uniform discharge of atmospheric pressure gas, in particular to a modulation method and device for uniform discharge of atmospheric pressure gas. Background technique [0002] Atmospheric pressure gas discharge is to use a high-voltage power supply to drive electrodes with a certain air gap spacing in an atmospheric pressure environment. When the voltage reaches a certain threshold, the gas will undergo breakdown discharge and generate plasma. Gas discharge and plasma have decades of theoretical and applied research history, and have a very wide range of application values, such as power propulsion, dust removal and sterilization, microwave materials, material surface treatment, coating, display, light source, ozone generation, etc. [0003] Among many gas discharge forms, dielectric barrier discharge is one of the more prominent application value. Typical generators for this type of discharge are figur...

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Problems solved by technology

[0007] (1) Obtaining a sufficiently low pd value can be achieved by reducing the electrode gap d, but in an atmospheric pressure air environment, the pd required to form a uniform discharge is very small, and the corresponding d value is also very small, only a few On the order of ten to hundreds of microns, this will inevitably increase the difficulty and cost of device processing, such as high-precision flatness processing on the surface of electrodes or dielectric plates, positioning control and measurement of small air gap spacing, etc.

[0008] (2) Reducing the air pressure is also a way to achieve uniform discharge, which will inevitably require the research and development of discharge experiments to be carried out in a low-pressure or vacuum environment, which increases the complexity of the research and development work, and is not conducive to the actual use of later research and development products

[0009] (3) Compared with atmospheric pressure air discharge, the use of rare gases (such as inert gases) to obtain uniform discharge can reduce the pd value requirements, but rare gases are obviously much more expensive than air, which will also greatly increase R & D and production costs

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