Microfluidic device and manufacturing method thereof

Abstract

The embodiment of the invention discloses a micro-fluidic device and a manufacturing method thereof. The micro-fluidic device comprises a micro-fluidic substrate, wherein the micro-fluidic substrate comprises a substrate, an electrode array layer and a hydrophobic layer, the electrode array layer and the hydrophobic layer are located on the substrate, and the electrode array layer comprises a plurality of electrodes arranged in an array; and a micro-fluidic structure layer which comprises at least one micro-fluidic channel; wherein the micro-fluidic substrate is used for applying voltage to the electrodes according to the micro-fluidic channel and driving liquid drops in the micro-fluidic channel to move. In the embodiment of the invention, the micro-fluidic substrate controls the potential of the electrode to perform movement control on the liquid drop, and additional driving equipment is not needed, so that the equipment volume is reduced, and the portability is improved; the micro-fluidic channel is arranged in the micro-fluidic structure layer, so that the movement path of the liquid drops can be limited, the movement control operation of the liquid drops is flexible, the liquid drops can be prevented from being disturbed by adjacent electrodes, and the movement path of the liquid drops is prevented from deviating. Therefore, the integration of the whole micro-fluidic device is realized, and the product cost is reduced.

Description

technical field [0001] Embodiments of the present invention relate to microfluidic technology, in particular to a microfluidic device and a manufacturing method thereof. Background technique [0002] Microfluidic chips have strong integration, fast analysis speed, low loss, low material consumption, and low pollution when processing samples. Therefore, microfluidic chips are widely used in biomedical research, drug synthesis and screening, environmental monitoring and protection, health and quarantine, and judicial It has extremely broad prospects for applications in many fields such as identification and detection of biological reagents. [0003] At present, the droplet driving method of the microfluidic chip is to use an external drive pump to draw the droplet to make it move. This driving method has high cost, large volume, and inflexible control. Contents of the invention [0004] Embodiments of the present invention provide a microfluidic device and a manufacturing m...

AI Technical Summary

Problems solved by technology

[0003] At present, the droplet driving method of the microfluidic chip is to use an external drive pump to draw the droplet to make it move. This driving method is costly, bulky, and inflexible in control.

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