Film inductor and manufacturing method thereof

Abstract

The invention discloses a film inductor and a manufacturing method thereof. The film inductor comprises a coil assembly, a first magnetic conductive layer, a second magnetic conductive layer and a magnetic conductive core. The coil assembly comprises a substrate, a first conductive circuit arranged on the first surface of the substrate and a second conductive circuit arranged on the second surface of the substrate. The first conductive circuit and the second conductive circuit are respectively embedded in the first magnetic conductive layer and the second magnetic conductive layer. A part of the first magnetic conductive layer is filled in a gap between any two adjacent circles of circuits of the first conductive circuit, and a part of the second magnetic conductive layer is filled in a gap between any two adjacent circles of circuits of the second conductive circuit. The magnetic conductive core is arranged between the first magnetic conductive layer and the second magnetic conductive layer, and the magnetic conductive core is located in a through hole of the substrate. The first conductive circuit and the second conductive circuit are arranged on the substrate and surround the through hole. At least two of the first magnetic conductive layer, the second magnetic conductive layer and the magnetic conductive core are different in composition. Therefore, the process efficiency of the thin-film inductor is improved, and the characteristics and quality of the film inductor are improved.

Description

technical field [0001] The invention relates to an inductor, in particular to a thin film inductor and a manufacturing method thereof. Background technique [0002] First of all, most of the thin film inductors in the prior art use a wet printing process to manufacture the magnetically conductive layer used to wrap the coil in the thin film inductor. However, using the wet printing process to manufacture thin film inductors will make the thickness of each layer of the magnetic permeable layer unable to be effectively controlled, resulting in difficulties in mass production and low process efficiency. In addition, the material or composition of each magnetic conductive layer of the thin film inductors in the prior art is the same, so the characteristics of the thin film inductors cannot be effectively improved. [0003] Therefore, how to improve the process efficiency of thin film inductors and improve the characteristics and quality of thin film inductors through structural...

AI Technical Summary

Problems solved by technology

However, using the wet printing process to make thin film inductors will make the thickness of each layer of magnetic permeable layer unable to be effectively controlled, resulting in difficult mass production and low process efficiency.

In addition, the material or composition of each magnetic layer of the thin film inductors in the prior art is the same, so the characteristics of the thin film inductors cannot be effectively improved.

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