Micro-vibration suppression platform based on intelligent piezoelectric array and control method thereof

Abstract

The invention discloses a micro-vibration suppression platform based on an intelligent piezoelectric array. The micro-vibration suppression platform comprises an upper platform, a lower platform, main dampers and secondary dampers, wherein the main dampers and the secondary dampers are uniformly distributed between the upper platform and the lower platform; the main dampers and the secondary dampers are inclined; extension lines of the axes of the main dampers are intersected at a point above the upper platform; each damper comprises an outer sleeve, main shaft rods located on the central axis of the damper and a piezoelectric stack array arranged in the middle of the outer sleeve; each piezoelectric stack array at least comprises two piezoelectric stacks; the piezoelectric stacks are symmetrically distributed relative to the main shaft rods; and the centers of the arrays are hollow. Through the micro-vibration suppression platform, control and suppression of the micro-vibration signals in six degrees of freedom are realized, so that comprehensive suppression of the micro-vibration signals from all directions and motion dimensions is realized; the reliability of the vibration suppression platform is greatly improved; and the micro-vibration signals with low frequency and high anisotropy and randomness can be accurately suppressed in all directions and dimensions.

Description

Technical field [0001] The present invention relates to a platform and a control method thereof, and more particularly to a micro-vibration suppression platform based on a smart piezoelectric array and a control method thereof. Background technique [0002] The rapid development of high-tech technology, aerospace technology, biomedical technology, ultra-precision machining, urgently requires high-precision, high-stability precision mechanical system, and micro-vibration control has become constrained system accuracy and stability. One of important bottlenecks. Micro-vibration refers to a small disturbance of small vibration amplitude (generally ≤10 microns), bandwidth (0.1 Hz ~ 200 Hz). The cause of micro-vibration is very complicated, and it is possible to produce internal coupling in the system, and it is possible to come from an excitation outside the system. In mechanical systems, especially in precision mechanical systems, the presence of micro-vibration is greatly affected ...

AI Technical Summary

Problems solved by technology

However, there is only one piezoelectric stack inside the existing damper using piezoelectric materials, which has a small application range and is not effective in inductively suppressing low-frequency, anisotropic and random micro-vibration signals.

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