Mote particle and micro-pollution gas common detection and analysis multi-point system

Abstract

The invention discloses a mote particle and micro-pollution gas common detection and analysis multi-point system, which comprises an exhaust fan, a protective cover, an air particle measuring instrument and a controller. Air in a clean room workshop is fed into an air storage box through a transmission pipe by using the exhaust fan, and further enters the air particle measuring instrument through an air guide pipe; therefore, the purpose of measuring mote particles and micro pollution gas in the air in the clean room workshop is achieved. According to the invention, a plurality of groups of transmission pipes and exhaust fans are arranged, so that the purpose of measuring mote particles and micro-pollution gas in the air in the clean room workshop is achieved.When mote particles and micro-pollution gas in the air in the clean room workshop exceed the standard, the air particle measuring instrument sends an electric signal to the controller, and the controller further controls the alarm lamp to give an alarm, so that an operator can conveniently master the air condition in the clean room workshop in time, the purpose of measuring and monitoring the clean room workshop in real time is achieved, the pollution burning degree of the clean room workshop in a factory is known through early warning, and the yield of factory products is improved.

Description

technical field [0001] The invention relates to a detection and analysis multi-point system, in particular to a common detection and analysis multi-point system for dust particles and micro-pollution gases. Background technique [0002] Due to the recent rapid development of process technology, the current clean room workshop production technology has entered the 16-10nm process. In order to meet the ultra-high air quality requirements of the high-tech industry for product production, all manufacturers are actively improving the yield rate to improve competitiveness. In this harsh production environment, the air pollution (AMC, Airborne molecule contamination solution) in the clean room workshop has become a major factor affecting the manufacturing yield. The presence of trace amounts of corrosive gases may even destroy the entire process. [0003] In order to ensure and improve the yield rate of factory products, it is necessary to measure the air dust particles and micro-p...

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Problems solved by technology

[0002] Due to the recent rapid development of process technology, the current clean room workshop production technology has entered the 16-10nm process. In order to meet the ultra-high air quality requirements of the high-tech industry for product production, all manufacturers are actively improving the yield rate to improve competitiveness. In this harsh production environment, the air pollution (AMC, Airborne molecule contamination solution) in the clean room workshop has become a major factor affecting the manufacturing yield. The presence of traces of corrosive gases can even destroy the entire process in severe cases.

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