MEMS oscillator based on parameter pump

Abstract

The invention discloses an MEMS oscillator based on a parameter pump. A low-frequency resonator module is respectively connected with a low-frequency resonator first excitation module and a low-frequency resonator second excitation module through low-frequency resonant beams; the high-frequency resonator module is respectively connected with the high-frequency resonator first excitation module and the high-frequency resonator second excitation module through high-frequency resonant beams; the common beam module is used for connecting a low-frequency resonant beam and a high-frequency resonant beam in a mechanical connection mode; the low-frequency resonator module is connected with the low-frequency oscillator closed-loop oscillation circuit and is connected with the parameter pump module through the summator, and the high-frequency resonator module is connected with the high-frequency oscillator closed-loop oscillation circuit; and the low-frequency oscillator closed-loop oscillation circuit and the high-frequency oscillator closed-loop oscillation circuit respectively enable the low-frequency resonant beam and the high-frequency resonant beam to generate closed-loop oscillation at the resonant frequency, and the parameter pump module applies a dynamic stiffness modulation signal to the low-frequency resonant beam. According to the invention, the frequency stability of the MEMS oscillator is improved, and the parameter locking phenomenon between the oscillators is realized.

Description

technical field [0001] The invention belongs to the technical field of MEMS oscillators, in particular to a MEMS oscillator based on a parameter pump. Background technique [0002] The mechanical oscillator is the most important part of the resonant sensing device and electronic system that needs a clock reference, and its performance index directly affects the performance of the entire system. As the development of modern science and technology puts forward higher requirements for the superior performance of electronic equipment, MEMS oscillators with miniaturization, low cost, low energy consumption and easy integration have gradually entered people's field of vision to replace traditional large, difficult to integrate, Costly quartz crystal oscillators. However, due to the scale effect brought by the extremely small size of MEMS oscillators, it is easy to cause nonlinear problems, which greatly reduces their dynamic range, and also brings large amplitude instability and ...

AI Technical Summary

Problems solved by technology

However, due to unavoidable design errors and micro-nano manufacturing process errors, it is difficult to meet the integer ratio requirements of the resonant frequency of the coupled oscillator, which also makes the MEMS oscillator based on internal resonance and synchronization phenomenon only stay in the laboratory stage.

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