The application discloses a micro magnetic sensor combined with
electromagnetic induction and
Lorentz force and a preparation method thereof. The sensor comprises a high-frequency
resonance component, a low-frequency
resonance component and a
coupling beam between the two components. The high-frequency
resonance component comprises a driving
electrode, a high-frequency resonance structure, a first insulating layer on the side of the high-frequency resonance structure, a
Lorentz force driving coil, a second insulating layer on the side of the high-frequency resonance structure, a
metal shielding layer, a third insulating layer on the side of the high-frequency resonance structure and an
electromagnetic induction coil. The low-frequency resonance component comprises an induction
electrode, a low-frequency resonance structure, an insulating layer on the side of the low-frequency resonance structure and a
metal coil. The application establishes a composite magnetic sensitive architecture of electrostatic driving-
electromagnetic induction and
Lorentz force driving-electrostatic sensitivity on the
internal resonance coupling structure, so as to improve the
magnetic sensing performance through the superposition of two types of magnetic sensitive output signals. Meanwhile, the low-frequency
resonance amplitude amplification effect of
internal resonance is utilized to realize that the low-frequency resonance structure plate
capacitor serves as a
magnetic sensing signal output, so as to reduce the
power consumption of the Lorentz force type magnetic sensitive element.