The invention relates to a terahertz BIC metasurface-based VOC (
volatile organic compound) sensor, which comprises a
dielectric substrate, a
microfluidic channel substrate and a
microfluidic channel, and further comprises an array structure formed by periodically arranging four groups of all-
dielectric cylindrical high-resistance
silicon structures on one side of the
dielectric substrate, the
dielectric substrate and the four groups of all-dielectric cylindrical high-resistance
silicon structures form an all-dielectric continuum
bound state BIC metasurface, the Q value can be remarkably improved, and the continuum
bound state BIC metasurface and the
microfluidic channel substrate are integrated. The full-
dielectric structure in one unit is composed of four groups of cylindrical high-resistance
silicon, the four groups of cylindrical high-resistance silicon form a C4v symmetric
tetramer cluster, and the four groups of full-dielectric cylindrical high-resistance silicon are connected through thin fins and are integrated with a microfluidic channel, so that accurate measurement of a
volatile organic compound (VOC) object to be measured can be realized. The VOC sensor based on the terahertz BIC metasurface, provided by the embodiment of the invention, is combined with a terahertz time-domain
spectroscopy system, can realize effective measurement of VOC under different solution concentration conditions, is simple in structure and mature in manufacturing process, and has important application prospects in multiple fields such as terahertz source devices and terahertz sensing.