Gas concentration sensor based on pt symmetrical structure
A technology of gas concentration and symmetrical structure, applied in the field of sensing, can solve the problems of large sensor scale, large structure cycle, high cost, etc., and achieve the effect of simplifying the subsequent processing process, improving sensitivity and simple structure
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[0026] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.
[0027] A gas concentration sensor based on a PT symmetrical structure proposed according to an embodiment of the present invention will be described below with reference to the accompanying drawings.
[0028] figure 1 It is a structural schematic diagram of a gas concentration sensor based on a PT symmetrical structure according to an embodiment of the present invention.
[0029] like figure 1 As shown, the gas concentration sensor 10 includes: a lossy layer 100 , a first inductive layer 200 , a second inductive layer 300 and a...
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