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Fluid control device and method for manufacturing fluid control device

A technology of fluid control device and fluid flow path, which is applied in semiconductor/solid-state device manufacturing, valve device, valve operation/release device, etc. It can solve problems such as insufficient width, improve operating efficiency, reduce intrusion, and improve maintenance performance Effect

Inactive Publication Date: 2021-06-18
FUJIKIN INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for a fluid control device with a width of 10 mm, which will become mainstream in the future, the width is insufficient when joining with bolts.

Method used

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  • Fluid control device and method for manufacturing fluid control device
  • Fluid control device and method for manufacturing fluid control device
  • Fluid control device and method for manufacturing fluid control device

Examples

Experimental program
Comparison scheme
Effect test

no. 1 Embodiment approach

[0052]In this embodiment, the plunger is provided at a position corresponding to each joint block and each joint block is positioned. A plurality of screw holes for screwing the plunger may be provided in advance in the rail member, and the screw holes to be screwed with the plunger may be selected in accordance with the position of the joint block.

[0053] Such as figure 1 As shown, in the fluid control device 1 , five rail members 50 serving as supporting members are arranged on the metal substrate 10 along the width directions W1 , W2 and extend along the length directions G1 , G2 . In addition, W1 shows the direction of the front side, W2 shows the direction of the back side, G1 shows the direction of the upstream side, and G2 shows the direction of the downstream side. Only at the two ends of the five guide rail members 50 and the guide rail members 50 at the center are provided with various components, and no components are provided at the second and fourth guide rail...

no. 2 Embodiment approach

[0102] In the present embodiment, only one plunger is provided on each rail member 50 (support member), and all the joint blocks arranged in contact with each other are integrally positioned.

[0103] Figure 8It is a front view showing an assembly 200 constituting one system of the fluid control device of the present embodiment. In this embodiment, only one plunger 500 is provided, and this plunger 500 engages with the concave portion 27 of the leftmost (upstream side) joint block 20 among the joint blocks 20 and 30 engaged with the guide rail member 50 . close, the joint block 20 is positioned. All other joint blocks 20 and 30 are arranged so as to be in contact with each other starting from the joint block 20 at the left end.

[0104] In the present embodiment, not only the short joint block 20 but also the long joint block 30 are disposed, and the joint blocks 20 and 30 abut under the mass flow controller 110E which is a large fluid device. From the side 21a or 21b (ref...

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PUM

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Abstract

Provided are a fluid control device which is further reduced in size and integrated without reducing the flow rate of supply of fluid, and which can be assembled with reduced man-hours; and a method for manufacturing a fluid device. The fluid control device has: a coupling block (20) in which a fluid passage open to the upper surface thereof is defined, and which has an engagement section on the bottom surface side thereof; a support member (50) in which a guide section (55) permits the coupling block (20) to move in a longitudinal direction and restrains the coupling block (20) on the upper surface; and fluid equipment affixed to the upper surface of the coupling block (20). The support member (50) has more than one plunger (500) provided such that the top ends thereof protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the coupling block. The recess engages with the top ends of the plungers (500) to set the longitudinal position of the coupling block (20).

Description

technical field [0001] The present invention relates to a fluid control device integrated with fluid equipment and a manufacturing method of the fluid control device. Background technique [0002] As a fluid control device used to supply various process gases to a chamber of a semiconductor manufacturing device or the like, a fluid control device in which a plurality of fluid devices are arranged from upstream to downstream is widely used. [0003] In the field of the above-mentioned fluid control device, higher responsiveness is required for the supply control of the process gas. Therefore, it is necessary to make the fluid control device as small and integrated as possible, and it is necessary to install the fluid control device closer to the The location of the chamber where the fluid is supplied to. [0004] In addition, the increase in the size of the object to be processed, such as the increase in the diameter of the semiconductor wafer, is increasing, and accordingly...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F16K27/00
CPCF16K27/003F16K27/0245F16K31/50H01L21/67017F15B13/0825
Inventor 相川献治中田知宏稻田敏之原田章弘松田隆博篠原努
Owner FUJIKIN INC