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Silicon carbide reflector modification machining and detection control system and method

A technology of silicon carbide and mirrors, applied in the control of workpiece feed movement, metal processing equipment, lenses, etc., can solve problems such as complex processing and inspection procedures

Inactive Publication Date: 2021-06-25
NANJING SIMITE OPTICAL INSTR
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The technical problem to be solved in the present invention is to provide a silicon carbide modification processing and detection control system and method for the complex processing and detection procedures of silicon carbide modification, using different detection methods in each stage of modification processing Detect the accuracy of silicon carbide to ensure the accuracy of silicon carbide processing, program the entire processing and inspection, save manpower to the greatest extent, and shorten the processing cycle

Method used

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  • Silicon carbide reflector modification machining and detection control system and method
  • Silicon carbide reflector modification machining and detection control system and method
  • Silicon carbide reflector modification machining and detection control system and method

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Embodiment Construction

[0022] The present invention will be further described below in conjunction with accompanying drawing and specific embodiment:

[0023] A silicon carbide mirror to be processed, with a size of 400×250 mm and an off-axis ellipsoidal surface, is placed on the processing table.

[0024] First enter the grinding stage, you need to call the processing unit. The central processor commands the numerical control module to control the DC servo motor so that the vacuum self-excited grinding head rotates and grinds the silicon carbide mirror, and the time controller, pressure sensor and position feedback module are used to control the vacuum self-excited grinding head on the surface of the silicon carbide mirror. The time, depth and position of the sanding can be controlled to control the sanding process. The detection sensor is set above the vacuum self-exciting grinding head, and it needs to be detected once in a while. When the detection sensor is detected to be in contact with the s...

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Abstract

The invention relates to the technical field of silicon carbide reflector modification machining and detection, in particular to a silicon carbide reflector modification machining and detection control system and method. A machining unit is used for integrally grinding a silicon carbide reflector. A rough polishing unit and a fine polishing unit of a polishing unit and a surface type improvement unit finish modification machining of the silicon carbide reflector by utilizing magnetron sputtering coating. After each step is finished, a precision detection unit is started, and a surface type detection module and a zero compensation interference detection module which are different in precision are adopted to detect the precision of the silicon carbide reflector so as to ensure the output quality.

Description

technical field [0001] The invention relates to the technical field of modification processing and detection of silicon carbide mirrors, in particular to a modification processing and detection control system and method of silicon carbide mirrors. Background technique [0002] Silicon carbide material has high rigidity and moderate density, and the silicon carbide mirror surface of the same quality is not easy to deform; and silicon carbide material has low thermal expansion coefficient, high thermal conductivity, excellent mechanical properties and thermophysical properties, and its specific stiffness is better than that of glass materials. The thermal deformation coefficient is the smallest, and it has very good radiation resistance and thermal shock resistance. Therefore, research institutions at home and abroad use silicon carbide as the material of choice for the mirror body of space cameras. [0003] However, silicon carbide is a ceramic material, and its surface densi...

Claims

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Application Information

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IPC IPC(8): B24B13/00B24B13/005B24B49/16B24B41/00B24B49/12B24B57/02B24B41/04
CPCB24B13/00B24B13/0055B24B49/16B24B41/007B24B49/12B24B57/02B24B41/04
Inventor 陶春
Owner NANJING SIMITE OPTICAL INSTR
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