Anti-vibration phase-shifting method applied to phase-shifting laser interferometer

Abstract

The invention discloses an anti-vibration phase-shifting method applied to a phase-shifting laser interferometer. The method comprises the following steps: acquiring data information of a group of interference images; performing vibration detection analysis on the data information of the interference image, and screening and processing a high-quality interference image group; and extracting phase information of the high-quality interferogram group by adopting an anti-vibration algorithm. The method does not need to be externally connected with any vibration sensing device, and performs detection algorithm analysis on the interference pattern group acquired by the phase-shift laser interferometer to automatically judge whether the interference fringe pattern acquired by the interferometer is subjected to relatively large vibration interference or not, so as to screen out the high-quality interference pattern group which is relatively small in vibration interference; and phase extraction work is carried out in combination with an anti-vibration algorithm based on a least square method principle, so that a better anti-vibration effect can be realized.

Description

technical field [0001] The invention relates to the field of optical technology, in particular to an anti-vibration phase-shifting method applied to a phase-shifting laser interferometer. Background technique [0002] Since the end of the 20th century, Phase Shifting Interferometry (PSI) has gradually replaced the traditional wave front measurement technology due to its advantages of high resolution and high precision, and has been used as a standard wave front measurement technology until now. PSI is a nanometer-scale ultra-high-precision measurement method with the unit of light wavelength. It is realized by a phase-shifting laser interferometer and is widely used in the field of optics, especially in the evaluation of optical system imaging quality and surface shape detection of optical devices. [0003] Although PSI has high measurement accuracy, it is often affected by various external factors in real-world applications: such as: the quality of interferometer optical co...

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Problems solved by technology

[0008] Aiming at the problem that the above-mentioned prior art cannot perform anti-vibration processing on images disturbed by excessive vibration, resulting in inaccurate iterative results, the present invention provides an anti-vibration phase-shifting method applied to a phase-shifting laser interferometer, which can effectively In the interferogram group obtained by the interferometer, high-quality interferograms that meet the quality requirements and are less affected by interference are screened out, which solves the problem that most current anti-vibration technologies cannot obtain suitable results when the vibration is too large; combined with the design based on The anti-vibration algorithm of the least squares principle and iterative method realizes the anti-vibration phase shifting of the phase-shifting interference system and achieves a better anti-vibration effect

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