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A microfluidic detection chip structure based on capacitive metamaterial structure artificial surface plasmon and its preparation and detection method

An artificial surface plasmon and detection chip technology, which is applied in the direction of material analysis, material capacitance, and analysis of materials through electromagnetic means, can solve the problems of low resolution and sensitivity, and achieve wide detection range, enhanced consistency, and detection range The effect of high sensitivity

Active Publication Date: 2022-05-27
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing terahertz spectrum detection method is realized by comparing the response changes of the metamaterial structure to the terahertz space wave before and after the liquid to be detected is covered. This method only has a single response to the terahertz wave, and the resolution and sensitivity are relatively low. Low

Method used

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  • A microfluidic detection chip structure based on capacitive metamaterial structure artificial surface plasmon and its preparation and detection method
  • A microfluidic detection chip structure based on capacitive metamaterial structure artificial surface plasmon and its preparation and detection method
  • A microfluidic detection chip structure based on capacitive metamaterial structure artificial surface plasmon and its preparation and detection method

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Embodiment 1

[0057] A microfluidic detection chip structure based on an artificial surface plasmon with a capacitive metamaterial structure, comprising a substrate layer grown sequentially from bottom to top, an artificial surface plasmon metal layer with a capacitive metamaterial structure, Microfluidic channel layer.

[0058] The plane of the substrate layer and the artificial surface plasmonic metal layer with capacitive metamaterial structure is as figure 1 shown. figure 1 SSPPTL is the abbreviation of spoof surface plasmon polaritons transmission line, which means artificial surface plasmon transmission line.

Embodiment 2

[0060] According to the microfluidic detection chip structure of artificial surface plasmon based on capacitive metamaterial structure according to Embodiment 1, the difference is:

[0061] The capacitive metamaterial structure is a split resonant ring structure, a capacitive inductance resonance metamaterial structure, a split ring resonant array structure or a capacitive inductance resonance metamaterial array structure. figure 2 It is a schematic diagram of the split resonant ring structure; image 3 It is a schematic diagram of the structure of the capacitor-inductance resonant metamaterial;

[0062] Figure 4 It is a schematic diagram of the structure of the split resonant ring array; Figure 5 It is a schematic diagram of the structure of the capacitor-inductance resonant metamaterial array;

[0063] Each open resonant ring unit in the artificial plasmonic metal layer with capacitive metamaterial structure is covered by a microfluidic channel in the microfluidic chann...

Embodiment 3

[0067] The preparation method of the microfluidic detection chip structure based on the artificial surface plasmon of the capacitive metamaterial structure described in the embodiment 1 or 2 includes the following steps:

[0068] ①Clean the substrate layer and spin-coat photoresist;

[0069] Cleaning the backing layer, including:

[0070] First, use DECON, deionized water, and acetone to clean the substrate layer in sequence;

[0071] Then, use deionized water to rinse the substrate layer;

[0072] Finally, the substrate layer was blown dry with nitrogen.

[0073] ②Using photolithography technology, define the artificial surface plasmon metal layer pattern with capacitive metamaterial structure on the substrate layer spin-coated with photoresist in step ②, and develop the pattern;

[0074] ③Using electron beam evaporation coating technology and stripping technology, in step ②, the artificial surface plasmon metal layer with capacitive metamaterial structure is evaporated on...

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Abstract

The invention relates to an artificial surface plasmon microfluidic detection chip structure based on a capacitive metamaterial structure and its preparation and detection methods, including a substrate layer grown sequentially from bottom to top, and a chip with a capacitive metamaterial structure. Artificial surface plasmon metal layer, microfluidic channel layer. The invention combines artificial surface plasmons with special propagation characteristics such as high electric field confinement with metamaterials, and uses the local electric field enhancement of artificial surface plasmons and the consistency of fluid and light directions to improve detection sensitivity, and the detection range is the largest. 0 to 10THz; use the capacitive metamaterial on the artificial surface plasmon to further enhance the local electric field, and use the shift of the resonant peak intensity and frequency of the metamaterial for detection, which improves the detection sensitivity of the chip, and the detection range is 0 to 10THz between.

Description

technical field [0001] The invention relates to a microfluidic detection chip structure based on an artificial surface plasmon of a capacitive metamaterial structure and a preparation and detection method thereof, belonging to the cross technical field of electromagnetic field and microwave technology and liquid detection technology. Background technique [0002] Surface plasmon is a transmission-type surface wave generated at the interface between metal and medium. Its electric field decays exponentially along the normal direction of the metal surface. It has local electric field enhancement, small operating wavelength, high frequency cut-off, and no diffraction. It has great application prospects in material detection, miniaturized antennas, super-resolution imaging and subwavelength circuits. Due to the enhancement of the local electric field, surface plasmon-based detection devices have the characteristics of high sensitivity, ultra-fast response speed, no need to label ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01L3/00G01N21/59G01N27/22
CPCB01L3/502707G01N21/59G01N27/221
Inventor 张翼飞凌昊天宋爱民王卿璞
Owner SHANDONG UNIV
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