A beam vector deviation planning compensation method for spectral confocal on-machine measurement

Abstract

The invention provides a beam vector deviation planning compensation method for spectral confocal on-board measurement, belonging to the technical field of precision measurement. Integrate the optical displacement sensor on the ultra-precision four-axis lathe, build a spectral confocal on-machine measurement system, select the measurement reference point, and establish the initial coordinate relationship; then execute the beam direction calibration program and the measurement origin offset vector calibration program respectively; Execute the calibration procedure and rough adjustment process several times until the beam vector deviation is smaller than the adjustment resolution of the mechanical adjustment mechanism; then calculate the initial scanning measurement trajectory according to the complex surface profile; finally plan the measurement movement according to the final calibration result, and generate the beam by compensating the linear axis movement Vector offset compensation measurement procedure. The invention reduces the cosine measurement error of the complex curved surface, ensures that the measurement reference point is always located on the measurement programming track, solves the on-machine measurement error caused by the beam direction deviation and the measurement origin offset vector, and improves the on-machine measurement of the complex curved surface profile precision.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, in particular to a beam vector deviation planning compensation method for spectral confocal on-machine measurement. Background technique [0002] Complex surface parts are key components in the core equipment of major engineering fields such as aerospace, space exploration, and precision optics. Its surface often has geometric features such as functional structures and high-precision processing requirements. On-machine inspection during processing is a key step to ensure that products meet quality requirements. Optical sensors have been applied to the non-destructive and fast measurement of free-form surfaces. The surface data of the part is extracted by a non-contact high-precision displacement sensor, and the relationship between the coordinates of the machine tool, the position of the measurement spot, and the direction of the beam is accurately established, so as to obtain the...

AI Technical Summary

Problems solved by technology

This method adopts the compensation strategy of rough adjustment of beam vector deviation and measurement track correction to reduce the cosine measurement error of complex surfaces, and ensure that the measurement reference point is always on the measurement programming track, so as to solve the problem of beam direction deviation and measurement origin deviation in non-contact coordinate detection. The on-machine measurement error caused by the set vector improves the on-machine measurement accuracy of the complex surface profile

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