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Multifunctional planar capacitive flexible sensor and preparation method thereof

A flexible sensor and capacitive technology, which can be used in instruments, scientific instruments, electric/magnetic exploration, etc., can solve problems such as expensive preparation costs, poor structural design, and sudden drop in sensitivity

Active Publication Date: 2021-07-06
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the design and preparation of parallel-plate flexible capacitive sensors, there are still problems such as single function, poor structural design, sudden drop in sensitivity, complicated preparation process, and expensive preparation cost. Flexible and multifunctional capacitive sensors are of great significance

Method used

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  • Multifunctional planar capacitive flexible sensor and preparation method thereof
  • Multifunctional planar capacitive flexible sensor and preparation method thereof
  • Multifunctional planar capacitive flexible sensor and preparation method thereof

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preparation example Construction

[0047] see Figure 6 , the present invention also provides a kind of preparation method of multifunctional planar capacitive flexible sensor, and described preparation method mainly comprises the following steps:

[0048] S1. Preparation of PDMS prepolymer: select PDMS monomer, mix it with curing agent evenly at a ratio of 10:1, manually stir in a beaker for 10min-20min, and place it in vacuum for 30min-60min after stirring to remove air bubbles;

[0049] S2. Prepare the sensor base layer: select a glass slide with a thickness of 1 mm to 2 mm as the hard base, and use a glue homogenizer on the hard base at a speed of 300 r / min to 500 r / min, at a speed of 100 rpm / s to 150 rpm / s. Accelerate the spin coating of PDMS prepolymer for 60s to 90s; then use a hot plate to heat the PDMS prepolymer at a temperature of 85°C to 90°C for 2h to 3h to solidify, and peel off the PDMS prepolymer film from the hard substrate;

[0050] S3, prepare the sensor electrode layer: select the upper sur...

Embodiment 1

[0057] The preparation method of the multifunctional planar capacitive flexible sensor provided in Embodiment 1 of the present invention mainly includes the following steps:

[0058] S1. Preparation of PDMS prepolymer: Select PDMS monomer, mix it with curing agent evenly at a ratio of 10:1, manually stir in a beaker for 10 minutes, and place it in vacuum for 30 minutes after stirring to remove air bubbles;

[0059] S2, preparing the sensor base layer: select a glass slide with a thickness of 1 mm as the hard base, and use a coater to spin-coat the PDMS prepolymer on the hard base at a speed of 300r / min and an acceleration of 100rpm / s for 90s; after that Use a hot plate to heat the PDMS prepolymer at a temperature of 85°C for 3 hours to solidify it, and peel off the PDMS prepolymer film from the hard substrate, and the thickness of the obtained substrate layer is 0.3mm;

[0060] S3, prepare the sensor electrode layer: select the upper surface of the sensor base layer, and trans...

Embodiment 2

[0066] The preparation method of the multifunctional planar capacitive flexible sensor provided in Embodiment 2 of the present invention mainly includes the following steps:

[0067] S1. Preparation of PDMS prepolymer: select PDMS monomer, mix it with curing agent evenly at a ratio of 10:1, manually stir in a beaker for 15 minutes, and place it in vacuum for 40 minutes after stirring to remove air bubbles;

[0068] S2, preparing the sensor base layer: select a glass slide with a thickness of 1 mm as the hard base, and use a glue spreader to spin-coat the PDMS prepolymer on the hard base at a speed of 400r / min and an acceleration of 100rpm / s for 80s; after that Use a hot plate to heat the PDMS prepolymer at a temperature of 90°C for 2 hours to solidify it, and peel off the PDMS prepolymer film from the hard substrate, and the thickness of the obtained substrate layer is 0.4mm;

[0069] S3, prepare the sensor electrode layer: select the upper surface of the sensor base layer, an...

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Abstract

The invention belongs to the related technical field of flexible sensors, and discloses a multifunctional planar capacitive flexible sensor and a preparation method thereof. The flexible sensor comprises a packaging layer, an electrode layer, a substrate layer and a shielding layer which are stacked from top to bottom; the electrode layer comprises at least two electrodes which are arranged at intervals, and the at least two electrodes are mutually nested; and the flexible sensor measures compressive strain and tensile strain through mechanical deformation, and realizes proximity induction of an external conductor based on an edge effect of a capacitor. The structure of the flexible sensor is researched and designed, so that the flexible sensor can realize multifunctional measurement of pressure stress, tensile stress and proximity induction at the same time, and the flexible sensor is simple to prepare and relatively low in cost.

Description

technical field [0001] The invention belongs to the technical field related to flexible sensors, and more specifically relates to a multifunctional planar capacitive flexible sensor and a preparation method thereof. Background technique [0002] With the innovation of functional materials and the progress of manufacturing technology, flexible electronic devices have become a new type of research in the development of modern electronic systems because of their mechanical flexibility, stretchability, portability, device scalability, and biocompatibility. direction, and provide great value for the research and development of electronic devices in various fields, from bionic devices to soft robots. In the practical application process of many flexible electronic devices, flexible sensors occupy an extremely important position. Among many different types of flexible sensors, capacitive flexible sensors have the advantages of simple structure, easy signal acquisition, good temper...

Claims

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Application Information

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IPC IPC(8): G01L1/14G01V3/00
CPCG01L1/142G01V3/00
Inventor 吴豪仇裕淇
Owner HUAZHONG UNIV OF SCI & TECH
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