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A multi -function plane capacitance flexible sensor and its preparation method

A flexible sensor and capacitive technology, which is applied in the fields of instruments, scientific instruments, electric/magnetic exploration, etc., can solve the problems of flexible capacitive sensors such as single function, poor structural design, complex preparation process, etc., and achieve uniform distribution of sensitive fields , Simple structure, high sensitivity sensing effect

Active Publication Date: 2022-04-12
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the design and preparation of parallel-plate flexible capacitive sensors, there are still problems such as single function, poor structural design, sudden drop in sensitivity, complicated preparation process, and expensive preparation cost. Flexible and multifunctional capacitive sensors are of great significance

Method used

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  • A multi -function plane capacitance flexible sensor and its preparation method
  • A multi -function plane capacitance flexible sensor and its preparation method
  • A multi -function plane capacitance flexible sensor and its preparation method

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preparation example Construction

[0047] see Image 6 , the present invention also provides a kind of preparation method of multifunctional planar capacitive flexible sensor, and described preparation method mainly comprises the following steps:

[0048] S1. Preparation of PDMS prepolymer: select PDMS monomer, mix it with curing agent evenly at a ratio of 10:1, manually stir in a beaker for 10min-20min, and place it in vacuum for 30min-60min after stirring to remove air bubbles;

[0049] S2. Prepare the sensor base layer: select a glass slide with a thickness of 1 mm to 2 mm as the hard base, and use a glue homogenizer on the hard base at a speed of 300 r / min to 500 r / min, at a speed of 100 rpm / s to 150 rpm / s. Accelerate the spin coating of PDMS prepolymer for 60s to 90s; then use a hot plate to heat the PDMS prepolymer at a temperature of 85°C to 90°C for 2h to 3h to solidify, and peel off the PDMS prepolymer film from the hard substrate;

[0050] S3, prepare the sensor electrode layer: select the upper surf...

Embodiment 1

[0057] The preparation method of the multifunctional planar capacitive flexible sensor provided in Embodiment 1 of the present invention mainly includes the following steps:

[0058] S1. Preparation of PDMS prepolymer: Select PDMS monomer, mix it with curing agent evenly at a ratio of 10:1, manually stir in a beaker for 10 minutes, and place it in vacuum for 30 minutes after stirring to remove air bubbles;

[0059] S2, preparing the sensor base layer: select a glass slide with a thickness of 1 mm as the hard base, and use a coater to spin-coat the PDMS prepolymer on the hard base at a speed of 300r / min and an acceleration of 100rpm / s for 90s; after that Use a hot plate to heat the PDMS prepolymer at a temperature of 85°C for 3 hours to solidify it, and peel off the PDMS prepolymer film from the hard substrate, and the thickness of the obtained substrate layer is 0.3mm;

[0060] S3, prepare the sensor electrode layer: select the upper surface of the sensor base layer, and trans...

Embodiment 2

[0066] The preparation method of the multifunctional planar capacitive flexible sensor provided in Embodiment 2 of the present invention mainly includes the following steps:

[0067] S1. Preparation of PDMS prepolymer: select PDMS monomer, mix it with curing agent evenly at a ratio of 10:1, manually stir in a beaker for 15 minutes, and place it in vacuum for 40 minutes after stirring to remove air bubbles;

[0068] S2, preparing the sensor base layer: select a glass slide with a thickness of 1 mm as the hard base, and use a glue spreader to spin-coat the PDMS prepolymer on the hard base at a speed of 400r / min and an acceleration of 100rpm / s for 80s; after that Use a hot plate to heat the PDMS prepolymer at a temperature of 90°C for 2 hours to solidify it, and peel off the PDMS prepolymer film from the hard substrate, and the thickness of the obtained substrate layer is 0.4mm;

[0069] S3, prepare the sensor electrode layer: select the upper surface of the sensor base layer, an...

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Abstract

The invention belongs to the technical field related to flexible sensors, and discloses a multifunctional planar capacitive flexible sensor and a preparation method thereof. The flexible sensor includes a packaging layer, an electrode layer, a base layer and a shielding layer stacked from top to bottom; The electrode layer includes at least two electrodes arranged at intervals, and at least two electrodes are nested with each other; the flexible sensor measures the compressive strain and the tensile strain through mechanical deformation, and at the same time realizes the monitoring of the external conductor based on the edge effect of capacitance. Proximity sensing. The invention researches and designs the structure of the flexible sensor, so that the flexible sensor can simultaneously realize the multifunctional measurement of compressive stress, tensile stress and proximity induction, and has simple preparation and low cost.

Description

technical field [0001] The invention belongs to the technical field related to flexible sensors, and more specifically relates to a multifunctional planar capacitive flexible sensor and a preparation method thereof. Background technique [0002] With the innovation of functional materials and the progress of manufacturing technology, flexible electronic devices have become a new type of research in the development of modern electronic systems because of their mechanical flexibility, stretchability, portability, device scalability, and biocompatibility. direction, and provide great value for the research and development of electronic devices in various fields, from bionic devices to soft robots. In the practical application process of many flexible electronic devices, flexible sensors occupy an extremely important position. Among many different types of flexible sensors, capacitive flexible sensors have the advantages of simple structure, easy signal acquisition, good temper...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/14G01V3/00
CPCG01L1/142G01V3/00
Inventor 吴豪仇裕淇
Owner HUAZHONG UNIV OF SCI & TECH
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