The invention belongs to the technical field of flexible electronic sensors, and particularly relates to an interdigital coplanar capacitive conformal flexible
pressure sensor. The sensor sequentially comprises a flexible substrate, an interdigital coplanar
electrode layer, a
dielectric layer and an attached packaging layer from bottom to top, interdigital electrodes which are mutually staggered in the interdigital coplanar
electrode layer are integrated in the same plane, the
electrode materials are flexible conductive composite materials, and the ratio of the finger width to the finger distance is 1: 1 to 1: 2; the
dielectric layer is selected from a pure flexible
polymer or a
polymer-
ionic liquid composite
system. According to the invention, through the electrode coplanar design, the interface combination enhancement and the micro-structure cooperative
adaptation, the problems of easy interlayer stripping, complex
signal extraction and insufficient conformal performance of the existing interdigital coplanar
capacitor structure in the traditional
parallel plate capacitor structure are thoroughly solved. Under the extreme conformal state that the bending
radius is not larger than 3 mm and the
tensile strain is not larger than 40%, the
pressure sensitivity of the sensor is not lower than 12 kPa <-1 >, the
cycling stability is excellent, the sensor can be tightly attached to a dynamic curved surface, and the sensor is suitable for the fields of wearable health monitoring, man-
machine interaction, flexible
robot sensing and the like.