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115 results about "Areal capacitance" patented technology

1 Answer 1. "Areal capacitance" is the same as saying "capacitance per unit of area.". "Areal" is the adjectival form of the word "area.". To confirm this, the meaning is obvious from the units given in the paper:

Planar capacitive transducer

A transducer comprising at least one planar capacitor with a thin coverlayer of material selected to maximize electric field coupling between cooperating capacitor electrodes within a region external to a principal surface of the coverlayer. Preferred coverlayer materials have low values of moisture absorption, surface free energy, permittivity, dielectric dissipation, and electrical conductance. According to one embodiment of the invention, a driven shield further enhances electric field coupling over and in a region external to the principal surface. The transducer also can promote a physical change in specific adsorbates and materials and simultaneously detect and measure an effect of the induced change. Applications for the transducer of the invention include the measurement of the moisture content of grain and bulk stored commodities, humidity, a dew point temperature, the onset of condensation and rates of adsorption and desorption.
Owner:MCINTOSH ROBERT B

All-solid-state-supercapacitor and a process for the fabrication thereof

The present invention discloses. all-solid-state supercapacitor (ASSP) with enhanced electrode-electrolyte interface which gives highest very high specific capacitance, areal capacitance and shows very low internal resistance (ESR). The invention particularly discloses the fabrication of all-solid-state supercapacitor by intercalation of solid state polymer electrolyte inside the conducting porous substrate coated with a charge storage electrode material to achieve the desired effect.
Owner:COUNCIL OF SCI & IND RES

Surface capacitance with area gestures

A surface capacitance touch sensitive surface (or “surface cap panel”) suitable for use in a touch screen or touchpad, wherein the surface cap panel has a substantially even coating of a conductive material on a non-conductive substrate and then covering the conductive material with a dielectric material, wherein a novel current measuring circuit reduces the effect of stray capacitance on the accuracy of a current measurement so that the relative X and Y position of an object on the surface cap panel can be determined using simple ratio equations, and wherein measuring the charge transfer rate in a measuring circuit, in addition to the total charge transfer for each toggle event, enables the location of two objects to be identified on the surface cap panel, wherein the charge transfer rate is used to determine the distance between two points of contact on the surface cap panel, and wherein height and width information related to the distance between the two points of contact can now be determined by doubling the number of electrodes at the corners of the surface cap panel.
Owner:CIRQUE CORPORATION

Oil liquid quality parameter detection method, sensor and on-line detection device

The present invention provides an oil liquid quality parameter detection method which is as follows: first, a sensing device first sensing signal when no magnetic field is in a to-be-tested oil liquid and a sensing device second sensing signal when a magnetic field is in the to-be-tested oil liquid are obtained, wherein a sensing device sensing end surface is placed in the to-be-tested oil liquid, a sensing device comprises a planar capacitive or quartz crystal microbalance, and the sensing signals comprise capacitance value signals or vibration signals; oil liquid quality parameters can be calculated by a predetermined algorithm according to the first sensing signal and the second sensing signal, wherein the oil liquid quality parameters comprise at least one of dielectric constant, moisture content, pH, acid the total amount of acid oxidizing materials and ferromagnetic particle content. Compared with the prior art, the above five oil liquid quality parameters can be fast calculated in real time only by use of the planar capacitive or quartz crystal microbalance, and the oil liquid quality can be more accurately judged.
Owner:BEIJING ZHIGAN SENSOR TECH RES INST CO LTD

Ring ceramic dielectric capacitors

The invention relates to a cyclic ceramic dielectric capacitor, which comprises two sets internal electrodes. Every set internal electrode is connected with a terminal electrode and comprises one or more layers conductive films, between the adjacent conductive films that belong to different internal electrodes is ceramic dielectric membrane lay that alternately lap on the internal electrode conductive film; the dielectric membrane and protective layer are laminated into homogeneous capacitor and both present as circularity, conductive films of the two sets internal electrodes are cyclic and the capacitor is cylinder with holes; the terminal electrode comprises outer-ring and inner-ring ones, wherein the metallized films of the inner-ring and outer-ring terminal electrode separately cover on the inner wall of the through-hole and the outer wall of the cylinder.
Owner:GUANGDONG FENGHUA BANGKE ELECTRONIC CO LTD

Device and method for detecting the environment change of windshield

A device and method for detecting environmental change of automobile windshield, the device comprises a plane capacitor which is disposed on the inner surface of the windshield, the two electrodes of said plane capacitor are disposed on the same plane, the total area of said two electrodes is less than 100 sq. centimeters, said plane capacitor is a sense element which detects the environmental change of windshield and environmental change after operating, said plane capacitor is electrically connected with a sensor detection circuit, the change signals in capacitance which is affected by the environmental is transmitted to said sensor detection circuit, and said sensor detection circuit is responsive to the change of capacitance to produce a control signal to control equipment work. The structure of this device is simple, and is able to overcome various defects including small measurement area, inability of detecting rainwater thickness, vulnerable to disturbance of pollutants, high installation requirements, low adaptability and high cost that exist in current photoelectric and plane capacitance type detecting devices.
Owner:BEIJING GOLDEN BRIDGE IP AGENCY

Method and device for measuring five degrees of freedom of main shaft based on cylindrical surface capacitor sensor

InactiveCN102095356ARealize dynamic measurementThe coupling relationship is simpleUsing electrical meansCapacitanceEngineering
The invention discloses a method and device for measuring the motion error of five degrees of freedom of a main shaft based on a cylindrical surface capacitor sensor. A stator is arranged at small end of a stepped rotor; four radial electrodes are arranged in the inner cylindrical surface of the stator; four electrodes and the small end of a rotor form four capacitors; and four equally-distributed end face electrodes are arranged on the lateral surface of the stator on one side of the large end face close to the stepped rotor and form another four capacitors with the large end of the rotor. In the measurement process, the rotor and the main shaft to be measured are fixedly connected together and synchronously rotate along the main shaft; the stator is fixedly arranged by a strut member; and the electrodes arranged on the stator and the electrodes on the rotor form capacitors. In the rotating process, when the main shaft radially jumps, axially plays or deflects, parameters of corresponding capacitors are changed and the capacitor values are correspondingly changed; and the motion displacements of the main shaft in the direction of five degrees of freedom in the rotating process can be obtained by measuring the set capacitor values and correspondingly and mathematically calculating the capacitor values. The device has simple structure and low cost.
Owner:ZHEJIANG UNIV

MIM capacitor and method of fabricating same

A damascene MIM capacitor and a method of fabricating the MIM capacitor. The MIN capacitor includes a dielectric layer having top and bottom surfaces; a trench in the dielectric layer, the trench extending from the top surface to the bottom surface of the dielectric layer; a first plate of a MIM capacitor comprising a conformal conductive liner formed on all sidewalls and extending along a bottom of the trench, the bottom of the trench coplanar with the bottom surface of the dielectric layer; an insulating layer formed over a top surface of the conformal conductive liner; and a second plate of the MIM capacitor comprising a core conductor in direct physical contact with the insulating layer, the core conductor filling spaces in the trench not filled by the conformal conductive liner and the insulating layer. The method includes forming portions of the MIM capacitor simultaneously with damascene interconnection wires.
Owner:GLOBALFOUNDRIES U S INC

Method and system for measuring position on surface capacitance touch panel using a flying capacitor

A touch panel having a substantially even coating of a conductive material on a non-conductive substrate and then covering the conductive material with a dielectric material, wherein a novel current measuring circuit reduces the effect of stray capacitance on the accuracy of a current measurement so that the relative X and Y position of an object on the touch panel can be determined using simple ratio equations.
Owner:CIRQUE CORPORATION

Structure of embedded capacitors and fabrication method thereof

A new structure is provided to replace the existing common planar capacitor structure used in printed circuit boards. The common planar capacitor structure utilizes a single dielectric layer and embedded capacitors with different capacitances are achieved by adjusting the sizes of the embedded capacitors' conductive terminals. Since general applications usually require capacitors whose capacitance range covers several orders of magnitude, these embedded capacitors have significant differences in terms of their conductive terminals' sizes. This will make the manufacturing process more complicated and difficult. The new structure combines inorganic material having a specific dielectric constant and polymer having another specific dielectric constant into a singulated coplanar capacitor structure.
Owner:KINSUS INTERCONNECT TECH

Planar capacitor with high stripping force and high dielectric constant and preparation method thereof

The invention provides a planar capacitor with high stripping force and high dielectric constant and a preparation method thereof. In a preparation process of the planar capacitor, surface rougheningtreatment is carried out on a metal film, a silane coupling agent layer is added between the metal film and a dielectric layer, the dielectric layer comprises a thermosetting resin polymer capable ofreacting with a silane coupling agent, pressurization and heating are carried out in the curingsnf molding process, and through the improvement of the process, the binding force between the dielectriclayer and the metal film is increased.
Owner:深圳市峰泳科技有限公司

X-Y-Theta displacement direct decoupling measuring device and method based on plane capacitor

InactiveCN101769712AEnables direct decoupled measurementsUsing electrical meansCapacitanceMeasurement device
The invention discloses a X-Y-Theta displacement direct decoupling measuring device and a method based on plane capacitors. The X-Y-Theta displacement direct decoupling measuring device consists of a moving polar plate and a fixed polar plate, wherein four groups of capacitor-electrode banks which are arranged in a quadrate shape are arranged on the fixed polar plate; four groups of sensing capacitor-electrode banks (eight in total) which are in one-to-one correspondence with the capacitor-electrode banks arranged on the fixed polar plate are arranged on the moving polar plate, and the initial positions of the two capacitor-electrode banks in one group in the corresponding measuring direction have a position difference of one quarter of period, making output signals have a phase difference of 90 degrees; in the process of measurement, when the moving polar plate generates plane displacement relatively to the fixed polar plate, the eight sensing capacitor-electrode banks generate eight capacitance output signals, X-axis and Y-axis plane displacement output signals can be directly decoupled through product-to-sum calculation under small-angle displacement so as to obtain a small angle displacement signal theta. The method can directly decouple to output X-axis and Y-axis displacement signals and the small-angle displacement signal theta, and has a high measuring speed.
Owner:ZHEJIANG UNIV

Load arrangement and electrical power arrangement for powering a load

The present invention relates to a load arrangement (400) for use in an electrical power arrangement (200) and for getting arranged at a first external electrically conductive element (50). The load arrangement comprises a load (20) having a first load terminal (2a) and a second load terminal (2b) for being powered by an AC power source (1), a first electrode (3) electrically connected to the first load terminal (2a), and a dielectric layer (4). The first electrode (3) and the dielectric layer (4) are arranged to form, in combination with a first external electrically conductive element (50) representing an outer surface of a marine structure, a capacitor (6) for capacitive transmission of electrical power between the first electrode (3) and the first external element (50). At least one of the capacitor (6) and the second load terminal (2b) is arranged for electrical power transmission through water (10) to form an electrical path via the water (10) between the AC power source (1) and the respective one of the capacitor and the second load terminal (2b). The first load terminal (2a) is electrically insulated from the second load terminal (2b).
Owner:KONINKLJIJKE PHILIPS NV

Electrode material based on multi-walled carbon nanotube-carbonized wood mixed support, preparation method thereof and supercapacitor

The invention discloses an electrode material based on a multi-walled carbon nanotube carbonized wood mixed support. The electrode material comprises a carbonized wood chip, wherein the carbonized wood chip is formed by carbonizing and activating a fir wood chip, a tubular cell structure is formed on the carbonized wood chip, and a multi-walled carbon nanotube grows on the inner wall of the tubular cell structure through chemical vapor deposition in-situ anchoring, so that an MWCNT-CW bracket is formed on the carbonized wood chip; and Co(OH)2 nanosheet coats the multi-walled carbon nanotube through electrochemical deposition to obtain the electrode material based on the multi-walled carbon nanotube-carbonized wood mixed support. A supercapacitor prepared from the electrode material has very high energy storage performance including 3.31 Fcm<-2> of surface capacitance, 0.9 mWhcm<-2> of energy density, 70 mWcm<-2> of power density and 97.8% of capacitance retention rate after 11,000 times of charging and discharging under the current density of 60 mAcm<-2>.
Owner:CENTRAL SOUTH UNIVERSITY OF FORESTRY AND TECHNOLOGY

Methods for heating and charging energy storage devices at very low temperatures

A method for heating an energy storage device having a core with an electrolyte, the method including: providing the energy storage device having inputs and characteristics of a capacitance across the electrolyte and the core and internal surface capacitance between the inputs which can store electric field energy between internal electrodes of the energy storage device that are coupled to the inputs; switching between a positive input voltage and a negative input voltage provided to one of the inputs at a frequency sufficient to effectively short the internal surface capacitance of the energy storage device to generate heat and raise a temperature of the electrolyte; and discontinuing the switching when the temperature of the electrolyte is above a predetermined temperature that is considered sufficient to increase a charging efficiency of the energy storage device.
Owner:OMNITEK PARTNERS LLC

Semiconductor device and manufacturing method thereof

A semiconductor device and a manufacturing method are provided. The semiconductor device includes an active region, a bit line, a capacitor contact, a conductive ring and a storage capacitor. The active region is formed in a substrate. The bit line and the capacitor contact are disposed over the substrate and electrically connected with the active region. The bit line is laterally separated from the capacitor contact, and a top surface of the bit line is lower than a top surface of the capacitor contact. An upper portion of the capacitor contact is surrounded by the conductive ring. The storage capacitor is disposed over and in electrical contact with the capacitor contact and the conductive ring.
Owner:WINBOND ELECTRONICS CORP

Method and apparatus for measuring relative dielectric constant

A relative-dielectric-constant measuring apparatus according to the present invention includes an ellipsometer and a capacitance measuring part. The ellipsometer allows non-contact measurements of the film thickness and optical constants of an insulation film formed on the upper surface of a wafer. The capacitance measuring part, on the other hand, allows non-contact measurements of the gap between the insulation film and an electrode and accumulation capacitance. The relative-dielectric-constant measuring apparatus can calculate the relative dielectric constant of the insulation film based on the measured film thickness, gap, and accumulation capacitance. Thus, the relative dielectric constant of the insulation film can be determined without contact and with high precision.
Owner:DAINIPPON SCREEN MTG CO LTD

Spherical surface capacitive type plane level detection sensor

The invention relates to a spherical surface capacitive type plane level detection sensor. The spherical surface capacitive type plane level detection sensor consists of a plastic spherical surface (1), a fixing electrode A (2), a fixing electrode B (3), a fixing electrode C (4), a liquid-state movable electrode (5) and a base (6), wherein the plastic spherical surface (1) is a hollow spherical surface and is internally provided with a half capacity of conductive liquid to form the liquid-state movable electrode (5); the outer surface of the plastic spherical surface (1) is longitudinally divided into trisection spherical surfaces; each of the one third spherical surfaces is provided with a metal film in a plating manner, so that the three fixing electrodes are formed; the three fixing electrodes are mutually insulated; the three fixing electrodes and the liquid-state movable electrode (5) form three changeable capacitors; when the base is arranged on a horizontal surface, the capacities of the three capacitors are equal; when a plane is inclined, the capacities of the three capacitors are changed, the position of the surface with the enlarged capacity is low, and the position of the surface with the reduced capacity is high, so that the level of the plane can be judged.
Owner:HUNAN UNIV OF SCI & ENG

Adjustable antenna device capable of detecting approaching object

The invention provides an adjustable antenna device capable of detecting an approaching object. The adjustable antenna device capable of detecting the approaching object includes a first radiator, a ground portion, a second radiator, a proximity sensing chip, and a variable capacitor. The first radiator comprises a signal feeding point, so that an antenna signal is fed to the first radiator. The variable capacitor and the proximity sensing chip are arranged in the range of the first radiator, the ground portion, and the second radiator, and used to adjust the frequency of the antenna. In addition, a plurality of switches and capacitor adjustment blocks can be used instead of the variable capacitor. The capacitance adjustment blocks and the ground portion are arranged on different surfacesof a circuit board. The areas of the capacitor adjustment blocks are different from each other. Switches are used to selectively electrically connect one of the capacitance adjustment blocks and the second radiator, so as to adjust the frequency of the antenna device. The antenna device provided by the invention can detect the approaching object and adjust the frequency.
Owner:YAGEO ELECTRONICS CHINA CO LTD +1

Liquid discharge apparatus and head unit

A liquid discharge apparatus includes: a modulation circuit that generates a modulated signal by pulse-modulating a source signal; a transistor that amplifies the modulated signal to generate an amplified modulated signal; a low-pass filter that includes an inductor and a capacitor and smoothes the amplified modulated signal to generate a drive signal; a feedback circuit that returns the drive signal to the modulation circuit; a circuit board; a piezoelectric element that is displaced by application of the drive signal thereto. The circuit board has a first mounting surface and a second mounting surface. The capacitor and the feedback circuit are mounted and a first ground wiring connected to the capacitor and a second ground wiring connected to the feedback circuit are provided on the first mounting surface. At least one of the modulation circuit, the transistor, and the inductor is mounted on the second mounting surface.
Owner:SEIKO EPSON CORP

Flexible electrode material, preparation method thereof and flexible supercapacitor

The invention provides a flexible electrode material, a preparation method thereof and a flexible supercapacitor. The method comprises the steps: selecting low-melting-point copolyamide and nylon 6 for synchronous electrostatic spinning to obtain a copolyamide / nylon 6 composite nanofiber membrane; then, carrying out hot-pressing treatment to melt the copolyamide to form bonding points so as to obtain a reinforced composite nanofiber membrane; and finally, growing polypyrrole on the reinforced composite nanofibers in an in-situ polymerization mode to obtain a flexible electrode material. The flexible supercapacitor is obtained by assembling the flexible electrode material with PVA-H3PO4 gel electrolyte. Through hot pressing treatment, the copolyamide fibers are melted to form bonding points, the reinforced composite nanofiber membrane with a multi-layer three-dimensional network structure is obtained, and the material is endowed with high conductivity through being compounded with the polypyrrole. The prepared flexible supercapacitor has the advantages of lightness, thinness, good flexibility, relatively high surface capacitance and energy density and the like, and is suitable for preparing a flexible wearable device.
Owner:WUHAN TEXTILE UNIV

Multifunctional planar capacitive flexible sensor and preparation method thereof

ActiveCN113074843AEnabling Versatile SensingImplement proximity sensingForce measurementElectric/magnetic detectionCapacitanceElectrical conductor
The invention belongs to the related technical field of flexible sensors, and discloses a multifunctional planar capacitive flexible sensor and a preparation method thereof. The flexible sensor comprises a packaging layer, an electrode layer, a substrate layer and a shielding layer which are stacked from top to bottom; the electrode layer comprises at least two electrodes which are arranged at intervals, and the at least two electrodes are mutually nested; and the flexible sensor measures compressive strain and tensile strain through mechanical deformation, and realizes proximity induction of an external conductor based on an edge effect of a capacitor. The structure of the flexible sensor is researched and designed, so that the flexible sensor can realize multifunctional measurement of pressure stress, tensile stress and proximity induction at the same time, and the flexible sensor is simple to prepare and relatively low in cost.
Owner:HUAZHONG UNIV OF SCI & TECH

Methods for heating and charging energy storage devices at very low temperatures

A method for heating an energy storage device having a core with an electrolyte, the method including: providing the energy storage device having inputs and characteristics of a capacitance across the electrolyte and the core and internal surface capacitance between the inputs which can store electric field energy between internal electrodes of the energy storage device that are coupled to the inputs; switching between an input voltage and a grounding input provided to one of the inputs at a frequency sufficient to effectively short the internal surface capacitance of the energy storage device to generate heat and raise a temperature of the electrolyte; and discontinuing the switching when the temperature of the electrolyte is above a predetermined temperature that is considered sufficient to increase a charging efficiency of the energy storage device.
Owner:OMNITEK PARTNERS LLC

Double-sided capacitor structure and forming method thereof

The invention relates to a double-sided capacitor structure and a forming method thereof. The forming method of the double-sided capacitor structure comprises the following steps: providing a base substrate which comprises a substrate, a capacitor contact located in the substrate, a laminated structure located on the surface of the substrate, and a capacitor hole which penetrates through the laminated structure and exposes the capacitor contact, and the laminated structure comprises sacrificial layers and supporting layers which are alternately stacked in the direction perpendicular to the substrate; sequentially forming a first electrode layer, a first dielectric layer and a second electrode layer on the inner wall of the capacitor hole; filling a first conductive material in the capacitor hole to form a first conductive filling layer; completely removing the plurality of sacrificial layers and / or supporting layers to enable at least two supporting layers to remain; and forming a second dielectric layer and a third electrode layer covering the surface of the second dielectric layer. According to the invention, the risk of electrode collapse and overturning is reduced or even avoided, and the capacitance value of the capacitor is increased.
Owner:CHANGXIN MEMORY TECH INC

Circuit board device, driving controller and water pump all-in-one machine

The present invention discloses a circuit board device, a driving controller and a water pump all-in-one machine. The circuit board device is arranged in a radiator and comprises a substrate, a capacitor, a power module and an electromagnetic compatible device, the top portion of the power module is connected with the bottom surface of the substrate, the capacitor and the electromagnetic compatible device are connected with the top surface of the substrate, and the bottom surface of the power module is connected on the radiator. The driving controller comprises the radiator and the circuit board device mentioned above. The radiator comprises a barrel body and a first heat radiation part, the barrel body is internally provided with a holding cavity, the circuit board device is located in the holding cavity, the power module is connected in the barrel body, the first heat radiation part is connected with the outer surface of the barrel body, and the power module and the first heat radiation part are correspondingly arranged on the barrel body. The water pump all-in-one machine comprises the driving controller mentioned above. The circuit board device, driving controller and the water pump all-in-one machine can effectively and rapidly emit heat of the power module to effectively avoid heat accumulation, ensure work performances of the circuit board device and prolong the service life.
Owner:科比传动技术(上海)有限公司

Preparation method of silicon carbide MOS capacitor gate oxide layer

The invention discloses a preparation method of a gate oxide layer of a silicon carbide MOS capacitor. The preparation method comprises the following steps: providing a SiC epitaxial wafer; cleaning the SiC epitaxial wafer; carrying out oxidation treatment on the cleaned SiC epitaxial wafer, forming a SiO2 gate oxide layer of a SiC MOS capacitor on the upper surface of the epitaxial wafer, and forming a lower surface SiO2 oxide layer on the lower surface of the epitaxial wafer; carrying out annealing treatment on the oxidized SiC epitaxial wafer; forming a metal upper electrode on the surfaceof the annealed upper surface SiC MOS capacitor gate oxide layer; and etching the lower surface oxide layer to form a metal lower electrode. By increasing the annealing temperature in the annealing treatment step, the interface defect density and the reliability of the gate oxide layer are optimized, the process is simple, the efficiency is high, and the cost is low.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Rotatable planar electrical capacitance tomography sensor

The invention discloses a rotatable planar electrical capacitance tomography sensor which comprises a planar electrical capacitance measuring electrode array, a substrate, a shielding shell, a sleeve,a fixed end cap, a rotating position indicating sheet and an initial and final position indicating sheet. The planar capacitance measuring electrode array is arranged on the upper plane of the substrate, the lower plane of the substrate is connected with the rotating center shaft, and the rotating center shaft sequentially penetrates through a center hole of the shielding shell and the sleeve andis finally connected with the fixed end cap with the rotating position indicating piece. The electrode array comprises a plurality of fan-shaped outer ring electrodes and inner ring electrodes whichare distributed at equal intervals and formed by taking the center of the substrate as an original point, the fan-shaped outer ring electrodes and the inner ring electrodes are arranged in a staggeredmanner, and gaps are formed between fan-shaped inner arcs of the outer ring electrodes and fan-shaped outer arcs of the inner ring electrodes. The sensor has the beneficial effects that the media with anisotropism of different dielectric constants can be detected, so that the sensitivity is relatively uniformly distributed under different conditions, and the PECT can obtain a relatively good imaging effect in various media.
Owner:CIVIL AVIATION UNIV OF CHINA

Planar capacitor and manufacturing method thereof

The invention provides planar capacitor which comprises a first electrode, a second electrode and a dielectric layer. The dielectric layer is positioned between the first electrode and the second electrode; the dielectric constant of the dielectric layer is greater than 100, the first electrode comprises a first conducting layer and a second conducting layer with viscosity, the first conducting layer adheres to the second conducting layer, the second conducting layer adheres to the dielectric layer, the second electrode comprises a third conducting layer and a fourth conducting layer with viscosity, the third conducting layer adheres to the fourth conducting layer, and the fourth conducting layer adheres to the dielectric layer. The dielectric layer of the planar capacitor has a relativelyhigh dielectric constant, so that the difficulty of a production process can be greatly reduced, and the production cost is reduced. The invention further relates to a manufacturing method of the planar capacitor.
Owner:深圳市峰泳科技有限公司

Double-sided capacitor structure, forming method thereof and DRAM

The invention discloses a double-sided capacitor structure, a forming method thereof and a DRAM. The forming method of the capacitor structure comprises the following steps: forming a conductive supporting layer on a semiconductor substrate; etching the conductive supporting layer, forming a plurality of capacitor holes in the conductive supporting layer, and taking the conductive supporting layeramong the capacitor holes as one part of an upper electrode of the double-sided capacitor; and forming a double-sided capacitor in the capacitor hole. The conductive supporting layer which has conductive performances is formed, so when the conductive supporting layer is etched by adopting a plasma etching process to form the capacitor hole, the charge accumulation effect caused by using insulating materials such as silicon oxide as a sacrificial layer can be effectively reduced, and the inhibition on high aspect ratio contact etching is reduced, so that the capacitor hole formed in the conductive supporting layer is prevented from generating a conical shape.
Owner:CHANGXIN MEMORY TECH INC
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