Sound detection device and preparation method thereof

Abstract

The invention discloses a sound detection device and a preparation method thereof. The sound detection device includes a substrate; a synaptic transistor which is positioned on one side of the substrate, wherein the synapse transistor comprises a grid electrode, a source electrode, a drain electrode, a charge storage layer located between the grid electrode and the source electrode and the drain electrode, an insulating layer located between the charge storage layer and the grid electrode and a channel layer located between the charge storage layer and the source electrode and the drain electrode, and the source electrode and the drain electrode are electrically connected with the channel layer; a nano friction generator which is positioned on one side of the substrate, wherein the nanometer friction generator comprises a positive friction layer and a negative friction layer which are oppositely arranged, the positive friction layer is electrically connected with the grid electrode, and the nanometer friction generator is used for controlling the positive friction layer to make contact with or be separated from the negative friction layer under driving of sound waves. According to the technical scheme, the synaptic transistor and the nanometer friction generator are combined to realize self-driving of the sound detection device, and the power consumption of the sound detection device is reduced.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of microelectronic devices, and in particular, to a sound detection device and a manufacturing method thereof. Background technique [0002] Biological auditory systems detect, process and store sound signals. At present, artificial synaptic systems that use microelectronic device systems to simulate biological auditory systems have gradually become a research hotspot for researchers. In order to enable microelectronic devices to simulate biological hearing, it is necessary to use microelectronic devices such as synaptic transistors to store and process sound signals. However, most of the synaptic transistors in the bionic system in the prior art require external power supply, which will increase the extra energy consumption of microelectronic devices such as synaptic transistors. Contents of the invention [0003] The invention provides a sound detection device and a preparation me...

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Problems solved by technology

However, most of the synaptic transistors in bionic systems in the prior art require external power supply, which will increase the extra energy consumption of microelectronic devices such as synaptic transistors

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